Optimization of Reactive-Ion Etching (RIE) parameters to maximize the lateral etch rate of silicon using SF6/N2 gas mixture: An alternative to etching Si in MEMS with Au components
Kazar Mendes, M., Ghouila-Houri, C., Hammami, S., Arnoult, T., Pernod, P., Talbi, A.
Published in Materials letters (15.02.2021)
Published in Materials letters (15.02.2021)
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Journal Article
Flight-Testing of a MEMS Wall Shear Stress Thermal Sensor on a Microlight Aircraft
Ghouila-Houri, C., Arnoult, T., Mazzamurro, A., Kern, S., Viard, R., Teillet, D., Palfi, E., Garnier, E., Talbil, A., Pernod, P.
Published in 2023 IEEE SENSORS (29.10.2023)
Published in 2023 IEEE SENSORS (29.10.2023)
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Conference Proceeding
Cavity flow controlled with an array of magneto-mechanical micro-valves
Arnoult, T., Ghouila-Houri, C., Leclercq, C., Mazzamurro, A., Viard, R., Garnier, E., Sipp, D., Merlen, A., Talbi, A., Pernod, P.
Published in 2021 IEEE Sensors (31.10.2021)
Published in 2021 IEEE Sensors (31.10.2021)
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Conference Proceeding
Realization of MEMS flush-mounted integration using Through Silicon Vias on thermal micro-sensors designed for aeronautics
Mazzamurro, A., Ghouila-Houri, C., Arnoult, T., Talbi, A., Pernod, P.
Published in 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (11.07.2022)
Published in 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (11.07.2022)
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Conference Proceeding
High temperature gradient micro-sensors for skin-friction measurement in flow control applications
Ghouila-Houri, C., Benedito, M., Garnier, E., Talbi, A., Mazzamurro, A., Viard, R., Merlen, A., Pernod, P., Arnoult, T., Gallas, Q.
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
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Conference Proceeding
Design of a solid-fluid acoustic sensor based on Fano resonances
Quotane, I., Amrani, M., Ghouila-Houri, C., el Boudouti, E. H., Krutyanskiy, L., Piwakowski, B., Pernod, Philippe, Talbi, Abdelkrim, Djafari-Rouhani, B.
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
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Conference Proceeding
Wind tunnel integration of Micro-Magneto-Mechanical Systems (MMMS) microvalves for flow control experiments
Arnoult, T., Leclercq, C., Ghouila-Houri, C., Mazzamurro, A., Benedito, M., Viard, R., Gallas, Q., Garnier, E., Sipp, D., Talbi, A., Pernod, P.
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)
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Conference Proceeding
Experimental closed-loop flow separation control: Data- and phenomenological-driven approaches
Arnoult, T., Acher, G., Nowinski, V., Vuillemin, P., Briat, C., Pernod, P., Ghouila-Houri, C., Talbi, A., Garnier, E., Poussot-Vassal, C.
Published in European journal of control (01.09.2024)
Published in European journal of control (01.09.2024)
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Journal Article
Subsonic cavity flow control with Micro-Magneto-Mechanical Systems (MMMS) microvalves
Arnoult, T., Leclercq, C., Ghouila-Houri, C., Mazzamurro, A., Viard, R., Garnier, E., Poussot-Vassal, C., Merlen, A., Sipp, D., Pernod, P., Talbi, A.
Published in Sensors and actuators. A. Physical. (01.05.2023)
Published in Sensors and actuators. A. Physical. (01.05.2023)
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Journal Article
High temperature gradient Pirani micro-sensor designed and tested for aerodynamic wall pressure measurement
Ghouila-Houri, C., Talbi, A., Viard, R., Arnoult, T., Kazar-Mendes, M., Mazzamurro, A., Gallas, Q., Garnier, E., Merlen, A., Pernod, P.
Published in IEEE sensors journal (15.06.2022)
Published in IEEE sensors journal (15.06.2022)
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Journal Article
Robust thermal microstructure for designing flow sensors and pressure sensors
Ghouila-Houri, C., Viard, R., Gallas, Q., Garnier, E., Merlen, A., Talbi, A., Pernod, P.
Published in 2017 IEEE SENSORS (01.10.2017)
Published in 2017 IEEE SENSORS (01.10.2017)
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Conference Proceeding
Aerodynamic wall pressure measurement using a high temperature gradient Pirani micro-sensor
Ghouila-Houri, C., Kazar-Mendes, M., Arnoult, T., Viard, R., Gallas, Q., Garnier, E., Merlen, A., Talbi, A., Pernod, P.
Published in 2020 IEEE Sensors (25.10.2020)
Published in 2020 IEEE Sensors (25.10.2020)
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Conference Proceeding
Mise en oeuvre de capteurs RF-MEMS acoustiques pour l’industrie 4.0
Dusch, Y., Ghouila Houri, C., Mazzamurro, A., Boussatour, G., Dahmani, H., Bou Matar, O., Maurice, V., Pernod, P., Talbi, A.
Published in Journal sur l'enseignement des sciences et technologies de l'information et des systèmes (2022)
Published in Journal sur l'enseignement des sciences et technologies de l'information et des systèmes (2022)
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Journal Article
Flow separation control design with experimental validation
Arnoult, T, Acher, G, Nowinski, V, Vuillemin, P, Briat, C, Pernod, P, Ghouila-Houri, C, Talbi, A, Garnier, E, Poussot-Vassal, C
Year of Publication 21.09.2023
Year of Publication 21.09.2023
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Journal Article
Flow separation control design with experimental validation
Arnoult, T, Acher, G, Nowinski, V, Vuillemin, P, Briat, C, Pernod, P, Ghouila-Houri, C, Talbi, A, Garnier, E, Poussot-Vassal, C
Published in arXiv.org (21.09.2023)
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Published in arXiv.org (21.09.2023)
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