Physical Properties of Titanium Oxide Thin Films Prepared by DC Magnetron Sputtering: Influence Substrate Temperature and O2/Ar in the Gas Mixture
Hantehzadeh, M. R., Amouha, M. Amou, Solaymani, S., Osati, T., Ghobadi, B.
Published in Journal of fusion energy (01.12.2013)
Published in Journal of fusion energy (01.12.2013)
Get full text
Journal Article
Physical Properties of Titanium Oxide Thin Films Prepared by DC Magnetron Sputtering: Influence Substrate Temperature and O.sub.2/Ar in the Gas Mixture
Hantehzadeh, M. R, Amouha, M. Amou, Solaymani, S, Osati, T, Ghobadi, B
Published in Journal of fusion energy (01.12.2013)
Published in Journal of fusion energy (01.12.2013)
Get full text
Journal Article