On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications
Ghasemi, Salar, Afrang, Saeid, Rezazadeh, Ghader, Darbasi, Sima, Sotoudeh, Behzad
Published in Microsystem technologies : sensors, actuators, systems integration (01.08.2020)
Published in Microsystem technologies : sensors, actuators, systems integration (01.08.2020)
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