Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings
Ghalichechian, N., Modafe, A., Beyaz, M.I., Ghodssi, R.
Published in Journal of microelectromechanical systems (01.06.2008)
Published in Journal of microelectromechanical systems (01.06.2008)
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Journal Article
Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion
Modafe, A, Ghalichechian, N, Frey, A, Lang, J H, Ghodssi, R
Published in Journal of micromechanics and microengineering (01.09.2006)
Published in Journal of micromechanics and microengineering (01.09.2006)
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Journal Article
Conference Proceeding
A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers
Modafel, A., Ghalichechian, N., Frey, A., Lang, J.H., Ghodssi, R.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding
W-Band True-Time Delay Phase Shifters Using Paraffin Microactuators
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Conference Proceeding
The Design of High-Responsivity Millimeter Wave Imager using Vanadium Dioxide Microbolometers
Chen, Shangyi, Ghassemiparvin, B, Ghalichechian, N
Published in IET Conference Proceedings (09.04.2018)
Published in IET Conference Proceedings (09.04.2018)
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Conference Proceeding
Electrical characterization of benzocyclobutene polymers for electric micromachines
Modafe, A., Ghalichechian, N., Kleber, B., Ghodssi, R.
Published in IEEE transactions on device and materials reliability (01.09.2004)
Published in IEEE transactions on device and materials reliability (01.09.2004)
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Magazine Article
Photodiode position sensors for integrated feedback control of a long-range micropositioner
Beyaz, M.I., McCarthy, M., Ghalichechian, N., Ghodssi, R.
Published in 2008 IEEE Sensors (01.10.2008)
Published in 2008 IEEE Sensors (01.10.2008)
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Conference Proceeding
Toward an autonomous electrostatic micromotor: Integrated feedback control
Beyaz, M.I., Ghalichechian, N., Ghodssi, R.
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
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Conference Proceeding
A Rotary Micromotor Supported on Microball Bearings
Ghalichechian, N., Modafe, A., Beyaz, M.I., Ghodssi, R.
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
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Conference Proceeding
Toward smart micromachines with integrated feedback control
Ilker Beyaz, M., Ghalichechian, N., Ghodssi, R.
Published in 2007 International Semiconductor Device Research Symposium (01.12.2007)
Published in 2007 International Semiconductor Device Research Symposium (01.12.2007)
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Conference Proceeding