Dynamics in lithographic projection objectives
Wengert, Nicolai, Nefzi, Marwène, Eberhard, Peter, Geuppert, Bernhard
Published in Multibody system dynamics (01.08.2013)
Published in Multibody system dynamics (01.08.2013)
Get full text
Journal Article
리소그래피 장치, 리소그래피 투영 장치 및 디바이스 제조 방법
LOOPSTRA ERIK ROELOF, WIJCKMANS MAURICE WILLEM JOZEF ETIENNE, BUTLER HANS, GEUPPERT BERNHARD MATHIAS
Year of Publication 05.03.2019
Get full text
Year of Publication 05.03.2019
Patent
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT DEVICE
MUELLER ULRICH, GROMER OSWALD, KAUFMANN PAUL, GEUPPERT BERNHARD, STUEHLER JOACHIM, FREIMANN ROLF
Year of Publication 12.10.2010
Get full text
Year of Publication 12.10.2010
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LOOPSTRA ERIK ROELOF, LARO DICK ANTONIUS HENDRIKUS, VAN DER WIJST MARC WILHELMUS MARIA, OUDE NIJHUIS MARCO HENDRIKUS HERMANUS, KWAN YIM BUN PATRICK, BUTLER HANS, GEUPPERT BERNHARD, GUGLIELMI RABE RODOLFO
Year of Publication 02.12.2013
Get full text
Year of Publication 02.12.2013
Patent
Optical imaging devices for optical arrangement of lithography and methods thereof, and optical imaging devices for lithography and/or wafer inspection and methods thereof, methods for supporting an optical element unit having an optical element in a lithographic optical imaging device
Get full text
Patent