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Year of Publication 28.08.2008
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Year of Publication 28.08.2008
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Year of Publication 12.08.2008
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Focusing-device for the radiation from a light source
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Year of Publication 12.08.2008
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Year of Publication 12.08.2008
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Year of Publication 30.07.2012
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Year of Publication 30.07.2012
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Year of Publication 12.07.2012
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Year of Publication 12.07.2012
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Optical module for use in optical imaging device i.e. microlithography device, has holding device formed and/or optical unit is contacted, such that overflow rate of overflow amounts to specific value based on minimum overflow
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Year of Publication 17.04.2008
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Year of Publication 17.04.2008
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Lithographic Apparatus and Device Manufacturing Method
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Year of Publication 21.06.2012
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Year of Publication 21.06.2012
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Method of manufacturing an optical component
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Year of Publication 01.09.2009
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Year of Publication 01.09.2009
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Method of manufacturing an optical component
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Year of Publication 01.09.2009
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Year of Publication 01.09.2009
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LITHOGRAPHIEANLAGE UND VERFAHREN
XALTER, STEFAN, CORVES, BURKHARD, KNÜFERMANN, MARKUS, GELLRICH, BERNHARD, SCHUMACHER, MATHIAS, KUGLER, JENS, GEUPPERT, BERNHARD
Year of Publication 20.11.2014
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Year of Publication 20.11.2014
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OPTICAL PROJECTION SYSTEM
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Year of Publication 04.07.2007
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Year of Publication 04.07.2007
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Projection exposure system for microlithography with a measurement device
MUELLER ULRICH, GROMER OSWALD, KAUFMANN PAUL, GEUPPERT BERNHARD, STUEHLER JOACHIM, FREIMANN ROLF
Year of Publication 09.07.2014
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Year of Publication 09.07.2014
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EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
GRUNER TORALF, MALLMANN JOERG, KNEER BERNHARD, WEGMANN ULRICH, KUGLER JENS, SCHUSTER KARL-HEINZ, EHRMANN ALBRECHT, LOERING ULRICH, GEUPPERT BERNHARD, SORG FRANZ, WABRA NORBERT, HOCH RAINER
Year of Publication 10.06.2010
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Year of Publication 10.06.2010
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Adjustable assembly
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Year of Publication 21.06.2003
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Year of Publication 21.06.2003
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LITHOGRAPHIEANLAGE UND VERFAHREN
XALTER, STEFAN, CORVES, BURKHARD, GELLRICH, BERNHARD, SCHUMACHER, MATHIAS, KUGLER, JENS, KNUEFERMANN, MARKUS, GEUPPERT, BERNHARD
Year of Publication 23.01.2014
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Year of Publication 23.01.2014
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OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGEMENT FOR REDUCING IMAGE ABERRATIONS
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Year of Publication 01.10.2009
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Year of Publication 01.10.2009
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OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGEMENT FOR REDUCING IMAGE ABERRATIONS
SORG, FRANZ, GOEHNERMEIER, AKSEL, LOERING, ULRICH, SCHOEPPACH, ARMIN, GELLRICH, BERNHARD, KUGLER, JENS, LIMBACH, GUIDO, MEYER, PETER, HEMBACHER, STEFAN, XALTER, STEFAN, WEBER, ULRICH, HELLWEG, DIRK, GEUPPERT, BERNHARD
Year of Publication 09.09.2009
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Year of Publication 09.09.2009
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OPTICAL PROJECTION SYSTEM
MAHLMANN, MARTIN, SCHOEPPACH, ARMIN, PETASCH, THOMAS, GELLRICH, BERNHARD, FUERTER, GERHARD, RAU, JOHANNES, KUGLER, JENS, GEUPPERT, BERNHARD
Year of Publication 13.04.2006
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Year of Publication 13.04.2006
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