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Year of Publication 24.10.2013
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Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
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Year of Publication 16.05.2013
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Exposure apparatus and measuring device for a projection lens
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Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGEMENT FOR REDUCING IMAGE ABERRATIONS
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Year of Publication 01.08.2012
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PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH A MEASUREMENT DEVICE
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Year of Publication 23.07.2009
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Year of Publication 09.07.2009
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Year of Publication 09.07.2009
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Year of Publication 09.07.2009
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