Reduced etch lag and high aspect ratios by deep reactive ion etching (DRIE)
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Journal Article
Acoustic Metal Particle Focusing in a Round Glass Capillary
Gerlt, M. S, Paeckel, A, Pavlic, A, Rohner, P, Poulikakos, D, Dual, J
Year of Publication 24.05.2021
Year of Publication 24.05.2021
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Journal Article
Acoustic Metal Particle Focusing in a Round Glass Capillary
Gerlt, M S, Paeckel, A, Pavlic, A, Rohner, P, Poulikakos, D, Dual, J
Published in arXiv.org (26.05.2021)
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Published in arXiv.org (26.05.2021)
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