New Approaches for Characterization of Advanced Annealing Techniques for Ultra-Shallow Junction Formation
Timans, Paul, Hu, Yao Zhi, Gelpey, Jeff, McCoy, Steve, Lerch, Wilfried, Paul, Silke, Bolze, Detlef, Kheyrandish, Hamid
Published in Ion Implantation Technology 2008 (01.01.2008)
Published in Ion Implantation Technology 2008 (01.01.2008)
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Journal Article
Carrier Density Profiling of Ultra-Shallow Junction Layers Through Corrected C-V Plotting
Chen, James, Dimitrov, Dimitar, Dimitrova, Tatiana, Timans, Paul, Gelpey, Jeff, McCoy, Steve, Lerch, Wilfried, Paul, Silke, Bolze, Detlef
Published in AIP conference proceedings (01.01.2008)
Published in AIP conference proceedings (01.01.2008)
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Journal Article
Defect characterization in boron implanted silicon after flash annealing
Zhu, Lei, Chan, Jason, McCoy, Steve, Gelpey, Jeff, Guo, Baonian, Shim, Kyuha, David Theodore, N., Martin, Michael, Carter, Jesse, Hollander, Mark, Shao, Lin
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2008)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2008)
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Journal Article
Crystal Damage Removal by Spike and Flash Annealing
Lerch, Wilfried, Paul, Silke, Niess, Juergen, McCoy, Steve, Gelpey, Jeff, Cristiano, Fuccio, Duffy, Ray, Boninelli, Simona, Marcelot, Olivier, Francesco, Pier
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article
Device for determining the temperature of a substrate
Skorupa Wolfgang, Gelpey Jeff, Schumann Thomas, Reichel Denise, Lerch Wilfried
Year of Publication 04.04.2017
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Year of Publication 04.04.2017
Patent
DEVICE FOR DETERMINING THE TEMPERATURE OF A SUBSTRATE
SKORUPA WOLFGANG, LERCH WILFRIED, GELPEY JEFF, SCHUMANN THOMAS, REICHEL DENISE
Year of Publication 04.09.2014
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Year of Publication 04.09.2014
Patent
Annealing behavior of clustercarbon™ implants
Sekar, Karuppanan, Krull, Wade, Chan, Jason, McCoy, Steve, Gelpey, Jeff
Published in 2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors (01.09.2008)
Published in 2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors (01.09.2008)
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Conference Proceeding
Application and advantages of larger Boron cluster ions for 22nm and beyond technology nodes
Sekar, K., Krull, W., Chan, J., McCoy, S., Gelpey, J.
Published in 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (01.09.2009)
Published in 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (01.09.2009)
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Conference Proceeding
Crystal Damage Removal by Flash Annealing
Lerch, Wilfried, Paul, Silke, Niess, Juergen, McCoy, Steve, Gelpey, Jeff, Cristiano, Fuccio, Duffy, Ray
Published in Meeting abstracts (Electrochemical Society) (30.06.2006)
Published in Meeting abstracts (Electrochemical Society) (30.06.2006)
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Journal Article
Vorrichtung zum Bestimmen der Temperatur eines Substrats
SKORUPA, WOLFGANG, SCHUMANN, THOMAS, LERCH, WILFRIED, GELPEY, JEFF, REICHEL, DENISE
Year of Publication 17.04.2014
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Year of Publication 17.04.2014
Patent
Carrier density profiling of ultra-shallow junction layer through corrected C-V plotting
Chen, J., Dimitrov, D., Dimitrova, T., Timans, P., Gelpey, J., McCoy, S., Lerch, W., Paul, S., Bolze, D.
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
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Conference Proceeding
DEVICE FOR DETERMINING THE TEMPERATURE OF A SUBSTRATE
SKORUPA, WOLFGANG, SCHUMANN, THOMAS, LERCH, WILFRIED, GELPEY, JEFF, REICHEL, DENISE
Year of Publication 25.04.2013
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Year of Publication 25.04.2013
Patent
Vorrichtung zum Bestimmen der Temperatur eines Substrats
SKORUPA, WOLFGANG, SCHUMANN, THOMAS, LERCH, WILFRIED, GELPEY, JEFF, REICHEL, DENISE
Year of Publication 18.04.2013
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Year of Publication 18.04.2013
Patent
Flash Annealing Technology for USJ: Modeling and Metrology
Gelpey, J., McCoy, S., Camm, D., Lerch, W., Paul, S., Pichler, P., Borland, J.O., Timans, P.
Published in 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors (01.10.2006)
Published in 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors (01.10.2006)
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Conference Proceeding
45nm Node p+ USJ Formation With High Dopant Activation And Low Damage
Borland, J., Shishiguchi, S., Mineji, A., Krull, W., Jacobson, D., Tanjyo, M., Lerch, W., Paul, S., Gelpey, J., McCoy, S., Venturini, J., Current, M., Faifer, V., Hillard, R., Benjamin, M., Walker, T., Buczkowski, A., Zhiqiang Li, Chen, J.
Published in 2006 International Workshop on Junction Technology (2006)
Published in 2006 International Workshop on Junction Technology (2006)
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Conference Proceeding