Optimization of the size and shape of the scanning aperture in autocollimator-based deflectometric profilometers
Lacey, Ian, Geckler, Ralf D, Just, Andreas, Siewert, Frank, Arnold, Thomas, Paetzelt, Hendrik, Smith, Brian V, Yashchuk, Valeriy V
Published in Review of scientific instruments (01.02.2019)
Published in Review of scientific instruments (01.02.2019)
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