Thermal oxidation in wet oxygen of reactive ion-beam sputter-deposited silicon nitride films
FOURRIER, A, BOSSEBOEUF, A, BOUCHIER, D, GAUTHERIN, G
Published in Journal of the Electrochemical Society (01.04.1991)
Published in Journal of the Electrochemical Society (01.04.1991)
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Journal Article
WNx films prepared by reactive ion-beam sputter deposition
BOSSEBOEUF, A, FOURRIER, A, MEYER, F, BENHOCINE, A, GAUTHERIN, G
Published in Applied surface science (01.11.1991)
Published in Applied surface science (01.11.1991)
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Conference Proceeding
Journal Article
Cleaning of Si and GaAs crystal surfaces by ion bombardment in the 50-1500 eV range: influence of bombarding energy and sample temperature on damage and incorporation
RABINZOHN, P, GAUTHERIN, G, AGIUS, B, COHEN, C
Published in Journal of the Electrochemical Society (01.04.1984)
Published in Journal of the Electrochemical Society (01.04.1984)
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Conference Proceeding
Journal Article
Ion energy effects on the intrinsic stress in BxNy layers deposited by ion-beam-assisted evaporation
STAMBOULI, V, BURAT, O, BOUCHIER, D, GAUTHERIN, G
Published in Surface & coatings technology (05.12.1990)
Published in Surface & coatings technology (05.12.1990)
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Conference Proceeding
Journal Article
Epitaxial growth of single-crystal Si1-xGex on Si(100) by ion beam sputter deposition
MEYER, F, SCHWEBEL, C, PELLET, C, GAUTHERIN, G, BUXBAUM, A, EIZENBERG, M, RAIZMAN, A
Published in Thin solid films (1990)
Published in Thin solid films (1990)
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Conference Proceeding
Journal Article
Low temperature deposition of silicon nitride by reactive ion-beam sputtering
BOUCHIER, D, GAUTHERIN, G, SCHWEBEL, C, BOSSEBŒUF, A, AGIUS, B, RIGO, S
Published in Journal of the Electrochemical Society (01.03.1983)
Published in Journal of the Electrochemical Society (01.03.1983)
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Journal Article
WN x films prepared by reactive ion-beam sputter deposition
Bosseboeuf, A., Fourrier, A., Meyer, F., Benhocine, A., Gautherin, G.
Published in Applied surface science (1991)
Published in Applied surface science (1991)
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Journal Article
Effects of impurities on the interface of ion beam sputtered tungsten with silicon
Meyer, Françoise, Bouchier, Daniel, Benhocine, Abdelhamid, Gautherin, Guy
Published in Applied surface science (01.11.1991)
Published in Applied surface science (01.11.1991)
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Journal Article
Conference Proceeding
Epitaxial growth of single-crystal Si 1− xGe x on Si(100) by ion beam sputter deposition
Meyer, F., Schwebel, C., Pellet, C., Gautherin, G., Buxbaum, A., Eizenberg, M., Raizman, A.
Published in Thin solid films (1990)
Published in Thin solid films (1990)
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Journal Article
Ion beam sputtering deposition of tungsten: Energy and mass effects of primary ions
Meyer, Françoise, Louchier, Daniel, Stambouli, Valérie, Pellet, Claude, Schwebel, Christian, Gautherin, Guy
Published in Applied surface science (01.09.1989)
Published in Applied surface science (01.09.1989)
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Journal Article
Argon incorporation effects on the conductivity of metal layers
Stambouli, Valérie, Burat, Olivier, Bouchier, Daniel, Meyer, Françoise, Gilles, Jean-Paul, Gautherin, Guy
Published in Thin solid films (1990)
Published in Thin solid films (1990)
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Journal Article
Conference Proceeding
Characterization of ion-beam-sputtered tungsten films on silicon
Meyer, Françoise, Schwebel, Christian, Pellet, Claude, Gautherin, Guy
Published in Applied surface science (1989)
Published in Applied surface science (1989)
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Journal Article
Conference Proceeding
Annealing effect on mechanical stress in reactive ion-beam sputter-deposited silicon nitride films
FOURRIER, A, BOSSEBOEUF, A, BOUCHIER, D, GAUTHERIN, G
Published in Japanese Journal of Applied Physics (01.07.1991)
Published in Japanese Journal of Applied Physics (01.07.1991)
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Journal Article
Effects of Impurities on the Interface of Ion Beam Sputtered Tungsten With Silicon
Meyer, F, Bouchier, D, Benhocine, A, Gautherin, G
Published in Applications of surface science (24.03.1991)
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Published in Applications of surface science (24.03.1991)
Journal Article