Out of Plane Double Differential Quadrature Compensation Electrodes with ThELMA-Double Technology
Fedeli, P., Falorni, L., Yallico Sanchez, G. J., Riani, M., Gattere, G.
Published in 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (28.03.2023)
Published in 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (28.03.2023)
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Conference Proceeding
Antistiction Recoil Accelerometer
Gattere, G., Rizzini, F., Dall'Oglio, C.
Published in 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2020)
Published in 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2020)
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Conference Proceeding
High Performance MEMS IMU with ThELMA-Double Technology
Gattere, G., Rizzini, F., Guerinoni, L., Falorni, L., Valzasina, C., Vercesi, F., Corso, L., Allegato, G.
Published in 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (08.05.2022)
Published in 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (08.05.2022)
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Conference Proceeding
Geometrical and Process Effects on MEMS Dimensional Loss: a Frequency Based Characterization
Gattere, G., Rizzini, F., Corso, L., Alessandri, A., Tripodi, F., Paleari, S.
Published in 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.04.2019)
Published in 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.04.2019)
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Conference Proceeding
Experimental investigation of MEMS DRIE etching dimensional loss
Gattere, G., Rizzini, F., Corso, L., Alessandri, A., Tripodi, F., Gelmi, I.
Published in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2018)
Published in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2018)
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Conference Proceeding
A comprehensive model of beams' anisoelasticity in MEMS gyroscopes, with focus on the effect of axial non-vertical etching
Izadi, M., Braghin, F., Giannini, D., Milani, D., Resta, F., Brunetto, M. F., Falorni, L. G., Gattere, G., Guerinoni, L., Valzasina, C.
Published in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2018)
Published in 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2018)
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Conference Proceeding