Study on Initial Growth Behavior of RuO2 Film Grown by Pulsed Chemical Vapor Deposition: Effects of Substrate and Reactant Feeding Time
Han, Jeong Hwan, Lee, Sang Woon, Kim, Seong Keun, Han, Sora, Lee, Woongkyu, Hwang, Cheol Seong, Dussarat, Christian, Gatineau, Julien
Published in Chemistry of materials (24.04.2012)
Published in Chemistry of materials (24.04.2012)
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Journal Article
Growth of RuO2 Thin Films by Pulsed-Chemical Vapor Deposition Using RuO4 Precursor and 5% H2 Reduction Gas
Han, Jeong Hwan, Lee, Sang Woon, Kim, Seong Keun, Han, Sora, Hwang, Cheol Seong, Dussarrat, Christian, Gatineau, Julien
Published in Chemistry of materials (26.10.2010)
Published in Chemistry of materials (26.10.2010)
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Journal Article
Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
Kim, Woo-Hee, Kim, Min-Kyu, Maeng, W. J., Gatineau, Julien, Pallem, Venkat, Dussarrat, Christian, Noori, Atif, Thompson, David, Chu, Schubert, Kim, Hyungjun
Published in Journal of the Electrochemical Society (01.01.2011)
Published in Journal of the Electrochemical Society (01.01.2011)
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Journal Article
Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
Kim, Jae-Min, Lee, Han-Bo-Ram, Lansalot, Clement, Dussarrat, Christian, Gatineau, Julien, Kim, Hyungjun
Published in Japanese Journal of Applied Physics (01.05.2010)
Published in Japanese Journal of Applied Physics (01.05.2010)
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Journal Article
Growth characteristics and properties of indium oxide and indium-doped zinc oxide by atomic layer deposition
Kim, Donghyun, Nam, Taewook, Park, Jusang, Gatineau, Julien, Kim, Hyungjun
Published in Thin solid films (31.07.2015)
Published in Thin solid films (31.07.2015)
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Journal Article
루테늄 함유 층의 형성 방법 및 적층체
ARTEAGA MULLER ROCIO ALEJANDRA, PALLEM VENKATESWARA R, GIRARD JEAN MARC, GATINEAU JULIEN
Year of Publication 28.05.2024
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Year of Publication 28.05.2024
Patent
Substrate Dependent Growth Behaviors of Plasma-Enhanced Atomic Layer Deposited Nickel Oxide Films for Resistive Switching Application
Song, Seul Ji, Lee, Sang Woon, Kim, Gun Hwan, Seok, Jun Yeong, Yoon, Kyung Jean, Yoon, Jung Ho, Hwang, Cheol Seong, Gatineau, Julien, Ko, Changhee
Published in Chemistry of materials (21.12.2012)
Published in Chemistry of materials (21.12.2012)
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Journal Article
Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 Layers
Han, Jeong Hwan, Lee, Woongkyu, Jeon, Woojin, Lee, Sang Woon, Hwang, Cheol Seong, Ko, Changhee, Gatineau, Julien
Published in Chemistry of materials (21.12.2012)
Published in Chemistry of materials (21.12.2012)
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Journal Article
Deposition of highly pure ruthenium thin films with a new metal-organic precursor
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Conference Proceeding
Study on Initial Growth Behavior of RuO 2 Film Grown by Pulsed Chemical Vapor Deposition: Effects of Substrate and Reactant Feeding Time
Han, Jeong Hwan, Lee, Sang Woon, Kim, Seong Keun, Han, Sora, Lee, Woongkyu, Hwang, Cheol Seong, Dussarat, Christian, Gatineau, Julien
Published in Chemistry of materials (24.04.2012)
Published in Chemistry of materials (24.04.2012)
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Journal Article
Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO4 Precursor
Han, Jeong Hwan, Lee, Sang Woon, Choi, Gyu-Jin, Lee, Sang Young, Hwang, Cheol Seong, Dussarrat, Christian, Gatineau, Julien
Published in Chemistry of materials (27.01.2009)
Published in Chemistry of materials (27.01.2009)
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Journal Article
A new RuO4 solvent solution for pure ruthenium film depositions
GATINEAU, Julien, YANAGITA, Kazutaka, DUSSARRAT, Christian
Published in Microelectronic engineering (01.11.2006)
Published in Microelectronic engineering (01.11.2006)
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Conference Proceeding
Journal Article
지르코늄, 하프늄, 티타늄 전구체 및 이들을 이용한 4족 함유막의 증착
NOH WONTAE, KIM DAEHYEON, GATINEAU SATOKO, GATINEAU JULIEN, GIRARD JEAN MARC
Year of Publication 28.08.2019
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Year of Publication 28.08.2019
Patent
지르코늄, 하프늄, 티타늄 전구체 및 이를 이용한 4족 함유막의 증착
NOH WONTAE, KIM DAEHYEON, GATINEAU SATOKO, GATINEAU JULIEN, GIRARD JEAN MARC
Year of Publication 12.08.2019
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Year of Publication 12.08.2019
Patent
지르코늄, 하프늄, 티타늄 전구체 및 이를 이용한 4족 함유막의 증착
NOH WONTAE, GATINEAU JULIEN, GATINEAU SATOKO, GIRARD JEAN MARC, KIM DAEHYUN
Year of Publication 08.08.2019
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Year of Publication 08.08.2019
Patent
Growth of Conductive SrRuO 3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO 2 Layers
Han, Jeong Hwan, Lee, Woongkyu, Jeon, Woojin, Lee, Sang Woon, Hwang, Cheol Seong, Ko, Changhee, Gatineau, Julien
Published in Chemistry of materials (21.12.2012)
Published in Chemistry of materials (21.12.2012)
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Journal Article