Micromachined array-type Mirau interferometer for parallel inspection of MEMS
Albero, J, Bargiel, S, Passilly, N, Dannberg, P, Stumpf, M, Zeitner, U D, Rousselot, C, Gastinger, K, Gorecki, C
Published in Journal of micromechanics and microengineering (01.06.2011)
Published in Journal of micromechanics and microengineering (01.06.2011)
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Journal Article
Micromachined array-type Mirau interferometer for MEMS metrology
Gorecki, C., Bargiel, S., Albero, J., Passilly, N., Rousselot, C., Zeitner, U., Gastinger, K.
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
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Conference Proceeding