Channel polymer optical waveguides embedded in glass: Design, fabrication and characterization
Fernández Gavela, Adrián, García Granda, Miguel, Rodríguez García, José
Published in Optical materials (01.09.2015)
Published in Optical materials (01.09.2015)
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Journal Article
Critical points in the fabrication of microfluidic devices on glass substrates
Castaño-Álvarez, Mario, Pozo Ayuso, Diego F., García Granda, Miguel, Fernández-Abedul, M. Teresa, Rodríguez García, Jose, Costa-García, Agustín
Published in Sensors and actuators. B, Chemical (14.03.2008)
Published in Sensors and actuators. B, Chemical (14.03.2008)
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Journal Article
기판 상의 적어도 하나의 타겟을 측정하는 방법
VAN DEN BOS KAREL HENDRIK WOUTER, GARCIA GRANDA MIGUEL, YUEH CHENG TENG, JACOBS JORT ADRIANUS THOMAS
Year of Publication 21.05.2024
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Year of Publication 21.05.2024
Patent
리소그래피 장치의 초점 성능을 측정하기 위한 방법
GUITTET PIERRE YVES JEROME YVAN, SEGERS BART PETER BERT, BROUWER ERIC JOS ANTON, GARCIA GRANDA MIGUEL, MC NAMARA ELLIOTT GERARD
Year of Publication 11.05.2021
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Year of Publication 11.05.2021
Patent
Micro-structured integrated electro-optic LiNbO3 modulators
Janner, D., Tulli, D., García-Granda, M., Belmonte, M., Pruneri, V.
Published in Laser & photonics reviews (01.04.2009)
Published in Laser & photonics reviews (01.04.2009)
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Journal Article
METHOD AND APPARATUS FOR DETERMINING LITHOGRAPHIC QUALITY OF A STRUCTURE
MEGENS HENRICUS, XU LU, KRIST JOUKE, GROOTJANS WILLEM JAN, GARCIA GRANDA MIGUEL
Year of Publication 12.08.2015
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Year of Publication 12.08.2015
Patent
Design and Fabrication of Novel Ridge Guide Modulators in Lithium Niobate
Garcia-Granda, M., Hui Hu, Rodriguez-Garcia, J., Sohler, W.
Published in Journal of lightwave technology (15.12.2009)
Published in Journal of lightwave technology (15.12.2009)
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Journal Article
Fabrication and evaluation of single- and dual-channel (Π-design) microchip electrophoresis with electrochemical detection
Pozo-Ayuso, Diego F., Castaño-Álvarez, Mario, Fernández-la-Villa, Ana, García-Granda, Miguel, Fernández-Abedul, M. Teresa, Costa-García, Agustín, Rodríguez-García, Jose
Published in Journal of Chromatography A (08.02.2008)
Published in Journal of Chromatography A (08.02.2008)
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Journal Article
Method for measuring at least one target on a substrate
YUEH Cheng-Teng, GARCIA GRANDA Miguel, JACOBS Jort Adrianus Thomas, VAN DEN BOS Karel Hendrik Wouter
Year of Publication 01.05.2024
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Year of Publication 01.05.2024
Patent
METHOD FOR MEASURING AT LEAST ONE TARGET ON A SUBSTRATE
GARCIA GRANDA, Miguel, JACOBS, Jort, YUEH, Cheng-Teng, VAN DEN BOS, Karel
Year of Publication 13.04.2023
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Year of Publication 13.04.2023
Patent
METHOD FOR MEASURING AT LEAST ONE TARGET ON A SUBSTRATE
GARCIA GRANDA, Miguel, YUEH, Cheng-Teng, VAN DEN BOS, Karel, Hendrik, Wouter, JACOBS, Jort, Adrianus, Thomas
Year of Publication 05.04.2023
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Year of Publication 05.04.2023
Patent
Substrate comprising a target arrangement, associated patterning device and metrology method
OP 'T ROOT Wilhelmus Patrick Elisabeth Maria, GARCIA GRANDA Miguel, VAN DER SCHAAR Maurits, CRAMER Hugo Augustinus Joseph, VAN DEN BOS Karel Hendrik Wouter
Year of Publication 01.08.2024
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Year of Publication 01.08.2024
Patent
SUBSTRATE COMPRISING A TARGET ARRANGEMENT, ASSOCIATED PATTERNING DEVICE, LITHOGRAPHIC METHOD AND METROLOGY METHOD
GARCIA GRANDA, Miguel, VAN DEN BOS, Karel Hendrik Wouter, VAN DER SCHAAR, Maurits, OP 'T ROOT, Wilhelmus Patrick Elisabeth Maria, CRAMER, Hugo Augustinus Joseph
Year of Publication 28.06.2023
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Year of Publication 28.06.2023
Patent