Improving broad-beam ion etching equipment through innovative ion optics design
Li, Xingyu, Guan, Lulu, Gao, Jiuru, Yuan, Jie, Xu, Kaidong, Zhuang, Shiwei
Published in Journal of manufacturing processes (29.09.2023)
Published in Journal of manufacturing processes (29.09.2023)
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Journal Article
Sidewall Kink Elimination of Slanted Gratings Utilizing a Twice-Etching Method
Gao, Jiuru, He, Zhiwei, Dong, Shuo, Xie, Tingting, Yang, Yuxin, Zhuang, Shiwei, Xu, Kaidong
Published in 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) (17.03.2024)
Published in 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) (17.03.2024)
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Conference Proceeding