Surface-wave propagation along a corrugated plasma–dielectric interface
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Journal Article
Conference Proceeding
プラズマ応用技術におけるシミュレーション研究 3. Kinetic Computer Modeling of Microwave Surface-Wave Plasma Production
Published in プラズマ・核融合学会誌
(2004)
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Journal Article
Influence Of Rf Bias Phase On Inductively Coupled Plasma For Material Processing
Ganachev, Ivan P., Nakano, Haruka, Nakamura, Keiji
Published in 2021 IEEE International Conference on Plasma Science (ICOPS) (12.09.2021)
Published in 2021 IEEE International Conference on Plasma Science (ICOPS) (12.09.2021)
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Conference Proceeding
A new microwave-excited plasma source using an internal dielectric microwave applicator
Shimatani, K., Tsugami, Y., Ganachev, I.P.
Published in 2006 Asia-Pacific Microwave Conference (01.12.2006)
Published in 2006 Asia-Pacific Microwave Conference (01.12.2006)
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Conference Proceeding