Ion beam alignment for liquid crystal display fabrication
Doyle, J.P., Chaudhari, P., Lacey, J.L., Galligan, E.A., Lien, S.C., Callegari, A.C., Lang, N.D., Lu, M., Nakagawa, Y., Nakano, H., Okazaki, N., Odahara, S., Katoh, Y., Saitoh, Y., Sakai, K., Satoh, H., Shiota, Y.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2003)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2003)
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