Thin film temperature heat fluxmeters
Godefroy, J.C, Cléry, M, Gageant, C, François, D, Servouze, Y
Published in Thin solid films (15.12.1990)
Published in Thin solid films (15.12.1990)
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Journal Article
Aspect ratio dependent etching in advanced deep reactive ion etching of quartz
Chapellier, P., Lavenus, P., Bourgeteau-Verlhac, B., Gageant, C., Le Traon, O., Dulmet, B.
Published in 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.05.2017)
Published in 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.05.2017)
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Conference Proceeding
Sputtered yttria partially stabilized zirconia layers applied to thin film heat fluxmeters
Godefroy, J.C., Cléry, M., Diot, C., Kayser, P., Gageant, C.
Published in Surface & coatings technology (1992)
Published in Surface & coatings technology (1992)
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Journal Article
Sputtered yttria partially stabilized zirconia layers applied to thin film heat fluxmeters
GODEFROY, J. C, CLERY, M, DIOT, C, KAYSER, P, GAGEANT, C
Published in Surface & coatings technology (16.11.1992)
Published in Surface & coatings technology (16.11.1992)
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Conference Proceeding
Journal Article