Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Lauwers, A, Besser, P, Gutt, T, Satta, A, de Potter, M, Lindsay, R, Roelandts, N, Loosen, F, Jin, S, Bender, H, Stucchi, M, Vrancken, C, Deweerdt, B, Maex, K
Published in Microelectronic engineering (2000)
Published in Microelectronic engineering (2000)
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Journal Article
Conference Proceeding
Advanced process control in RTP using the "relative power"
Gutt, T.
Published in 2005 13th International Conference on Advanced Thermal Processing of Semiconductors (2005)
Published in 2005 13th International Conference on Advanced Thermal Processing of Semiconductors (2005)
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Conference Proceeding
Concept and status of the new sample preparation and analyzing facility at Bochum
Kubsky, S., Borucki, L., Berheide, M., Baier, S., Becker, H.-W., Gorris, F., Grunwald, C., Gutt, T., Krüger, G., Mehrhoff, M., Piel, N., Schulte, W.H., Rolfs, C.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.06.1996)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.06.1996)
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Journal Article
Deep melt activation using laser thermal annealing for IGBT thin wafer technology
Gutt, T, Schulze, H
Published in 2010 22nd International Symposium on Power Semiconductor Devices & IC's (ISPSD) (01.06.2010)
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Published in 2010 22nd International Symposium on Power Semiconductor Devices & IC's (ISPSD) (01.06.2010)
Conference Proceeding
Investigation of gate edge effect on interface trap density in 3C–SiC MOS capacitors
Gutt, T., Małachowski, T., Przewłocki, H.M., Engström, O., Bakowski, M., Esteve, R.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.09.2012)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.09.2012)
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Journal Article
Low temperatures in RTP
Gutt, T., Steinegger, T.
Published in 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors (2002)
Published in 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors (2002)
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Conference Proceeding
Electronic Properties of Thin HfO 2 Films Fabricated by Atomic Layer Deposition on 4H-SiC
Taube, A., Gierałtowska, S., Gutt, T., Małachowski, T., Pasternak, I., Wojciechowski, T., Rzodkiewicz, W., Sawicki, M., Piotrowska, A.
Published in Acta physica Polonica, A (01.05.2011)
Published in Acta physica Polonica, A (01.05.2011)
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Journal Article
Wet rapid thermal oxidation of vertical cavity surface emitting laser structures with pyrogenic steam generator
Gutt, T., Hin Yiu Anthony Chung, Feldmeyer, G.J.
Published in 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004 (2004)
Published in 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004 (2004)
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Conference Proceeding
The CIBH Diode - Great Improvement for Ruggedness and Softness of High Voltage Diodes
Felsl, H.P., Pfaffenlehner, M., Schulze, H., Biermann, J., Gutt, T., Schulze, H.-J., Chen, M., Lutz, J.
Published in 2008 20th International Symposium on Power Semiconductor Devices and IC's (01.05.2008)
Published in 2008 20th International Symposium on Power Semiconductor Devices and IC's (01.05.2008)
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Conference Proceeding
Low temperatures in RTP
Gutt, T.
Published in 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 (2001)
Published in 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 (2001)
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Conference Proceeding
Structural investigation of silicon carbide with micro-Raman spectroscopy
Borowicz, P., Gutt, T., Malachowski, T.
Published in 2009 MIXDES-16th International Conference Mixed Design of Integrated Circuits & Systems (01.06.2009)
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Published in 2009 MIXDES-16th International Conference Mixed Design of Integrated Circuits & Systems (01.06.2009)
Conference Proceeding
Comparative study of Ni-silicide and Co-silicide for sub 0.25- mu m technologies
Lauwers, A, Besser, P, Gutt, T, Satta, A, De Potter, M, Lindsay, R, Roelandts, N, Loosen, F, Jin, S, Bender, H
Published in Microelectronic engineering (07.03.1999)
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Published in Microelectronic engineering (07.03.1999)
Journal Article