SELF-CENTERING WAFER CARRIER SYSTEM FOR CHEMICAL VAPOR DEPOSITION
KRISHNAN SANDEEP, GURARY ALEXANDER I, MARCELO EARL, CHANG CHENGHUNG PAUL
Year of Publication 30.12.2016
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Year of Publication 30.12.2016
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METHODS AND SYSTEMS FOR IN-SITU PYROMETER CALIBRATION
KRISHNAN SANDEEP, KING MATTHEW, GURARY ALEXANDER I, BOGUSLAVSKIY VADIM
Year of Publication 16.01.2014
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Year of Publication 16.01.2014
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KEYED WAFER CARRIER
KROMMENHOEK STEVEN, KRISHNAN SANDEEP, KING MATTHEW, GURARY ALEXANDER I, MOY KENG, BOGUSLAVSKIY VADIM
Year of Publication 18.01.2016
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Year of Publication 18.01.2016
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KEYED WAFER CARRIER
KROMMENHOEK STEVEN, KRISHNAN SANDEEP, KING MATTHEW, GURARY ALEXANDER I, MOY KENG, BOGUSLAVSKIY VADIM
Year of Publication 16.10.2014
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Year of Publication 16.10.2014
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ROTATING DISK REACTOR WITH FERROFLUID SEAL FOR CHEMICAL VAPOR DEPOSITION
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A, MILGATE III ROBERT WHITE
Year of Publication 02.03.2016
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Year of Publication 02.03.2016
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MOVABLE INJECTORS IN ROTATING DISC GAS REACTORS
QUINN WILLIAM E, GURARY ALEXANDER I, SFERLAZZO PIERO, TING STEVE, ARMOUR ERIC A
Year of Publication 11.06.2010
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Year of Publication 11.06.2010
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 11.04.2018
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Year of Publication 11.04.2018
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 11.04.2018
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Year of Publication 11.04.2018
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 21.10.2017
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Year of Publication 21.10.2017
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 21.10.2017
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Year of Publication 21.10.2017
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 21.10.2017
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Year of Publication 21.10.2017
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 21.10.2017
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Year of Publication 21.10.2017
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 11.07.2017
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Year of Publication 11.07.2017
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 21.05.2017
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Year of Publication 21.05.2017
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 21.05.2017
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Year of Publication 21.05.2017
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 21.05.2017
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Year of Publication 21.05.2017
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WAFER CARRIER FOR DEPOSITION
Ｉ GURARY, ALEXANDER I, KRISHNAN, SANDEEP, CHANG, CHENGHUNG PAUL, MARCELO, EARL
Year of Publication 21.05.2017
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Year of Publication 21.05.2017
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