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An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters

by Cui, Jian, Liu, XueSong, Guo, ZhongYang, Zhao, QianCheng, Lin, LongTao, Yang, ZhenChuan, Hao, YiLong, Yan, GuiZhen
Published in Science China Technological Sciences (01.12.2011)

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Journal Article

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CMOS circuit and body silicon micromechanical system integraled method

by GUIZHEN,HAO YAN
Year of Publication 26.07.2006

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Patent

An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters

CMOS circuit and body silicon micromechanical system integraled method

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