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Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Porous SiOCH integration: etch challenges with a trench first metal hard mask approach
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Published in ECS transactions (2011)
Published in ECS transactions (2011)
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Published in Microelectronic engineering (2002)
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Conference Proceeding
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The Design and Fabrication of 0.35 µm Single-Polysilicon Self-Aligned Bipolar Transistors
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Published in Japanese Journal of Applied Physics (01.04.1998)
Published in Japanese Journal of Applied Physics (01.04.1998)
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