Process for the surface polishing of silicon wafers
Buschhardt, Thomas, Wenski, Guido, Hennhofer, Heinrich, Lichtenegger, Bruno
Year of Publication 20.06.2002
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Year of Publication 20.06.2002
Patent
Process for the surface polishing of silicon wafers
HENNHOFER HEINRICH, WENSKI GUIDO, LICHTENEGGER BRUNO, BUSCHHARDT THOMAS
Year of Publication 20.06.2002
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Year of Publication 20.06.2002
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Production of semiconductor wafers comprises simultaneously polishing front and rear sides of each wafer between polishing plates covered with cloth, evaluating and then re-polishing
WENSKI, GUIDO, BUSCHHARDT, THOMAS, HENNHOEFER, HEINRICH, LICHTENEGGER, BRUNO
Year of Publication 26.04.2001
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Year of Publication 26.04.2001
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Epitaxially coated semiconductor wafer and process for producing it
MESSMANN KLAUS, HEIER GERHARD, WENSKI GUIDO, ALTMANN THOMAS, FUERFANGER MARTIN, SIEBERT WOLFGANG
Year of Publication 31.05.2005
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Year of Publication 31.05.2005
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