Underlayer Designs to Enhance EUV Resist Performance
Guerrero, Douglas J., Xu, Hao, Mercado, Ramil, Blackwell, James
Published in Journal of Photopolymer Science and Technology (01.01.2009)
Published in Journal of Photopolymer Science and Technology (01.01.2009)
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Journal Article
Photochemical Studies on Bottom Anti-Reflective Coatings
Guerrero, Douglas J., Mercado, Ramil, Washburn, Carlton, Meador, Jim
Published in Journal of Photopolymer Science and Technology (01.01.2006)
Published in Journal of Photopolymer Science and Technology (01.01.2006)
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Journal Article
Organic Monolayer Determination on Semiconductor Substrates
Guerrero, Douglas J., Lowes, Joyce, Mercado, Ramil
Published in Journal of Photopolymer Science and Technology (01.01.2007)
Published in Journal of Photopolymer Science and Technology (01.01.2007)
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Journal Article
Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC–resist interface
Lenhart, Joseph L., Fischer, Daniel, Sambasivan, Sharadha, Lin, Eric K., Wu, Wen-Li, Guerrero, Douglas J., Wang, Yubao, Puligadda, Rama
Published in Applied surface science (01.02.2007)
Published in Applied surface science (01.02.2007)
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Journal Article
Photosensitive Titania Polymers
Guerrero, Douglas J., Flaim, Tony D.
Published in Journal of Photopolymer Science and Technology (01.01.2002)
Published in Journal of Photopolymer Science and Technology (01.01.2002)
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Journal Article
Finding the right kind of support: A study of carers of those with a primary malignant brain tumour
Arber, Anne, Hutson, Nicky, de Vries, Kay, Guerrero, Douglas
Published in European journal of oncology nursing : the official journal of European Oncology Nursing Society (01.02.2013)
Published in European journal of oncology nursing : the official journal of European Oncology Nursing Society (01.02.2013)
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Journal Article
Organic Underlayers for EUV Lithography
Guerrero, Dougllas J., Beaman, Carol, Sakamoto, Rikimaru, Endo, Takafumi, Ho, Bang-Ching
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Published in Journal of Photopolymer Science and Technology (01.01.2008)
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Journal Article
Somnolence syndrome in patients receiving radical radiotherapy for primary brain tumours: A prospective study
Powell, Cerri, Guerrero, Douglas, Sardell, Susan, Cumins, Sebastian, Wharram, Beverley, Traish, Daphne, Gonsalves, Adam, Ashley, Sue, Brada, Michael
Published in Radiotherapy and oncology (01.07.2011)
Published in Radiotherapy and oncology (01.07.2011)
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Journal Article
EUV 리소그래피를 위한 접착층
LEE HAO, CHACKO ANDREA M, GUERRERO DOUGLAS J, KRISHNAMURTHY VANDANA, LIANG YICHEN, GRANNEMANN STEPHEN
Year of Publication 27.01.2021
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Year of Publication 27.01.2021
Patent
Throughput Increases Using EUV Assist Layers
Washburn, Carlton, Ouattara, Tantiboro, Collin, Aline, Krishnamurthy, Vandana, Guerrero, Douglas
Published in ECS transactions (16.03.2012)
Published in ECS transactions (16.03.2012)
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Journal Article
ASSIST LAYERS FOR EUV LITHOGRAPHY
OUATTARA TANTIBORO, GUERRERO DOUGLAS, WASHBURN CARLTON, KRISHNAMURTHY VANDANA, COLLIN ALINE
Year of Publication 21.08.2014
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Year of Publication 21.08.2014
Patent
SILICON HARDMASK LAYER FOR DIRECTED SELF-ASSEMBLY
HOCKEY MARY ANN, GUERRERO DOUGLAS J, COX ROBERT C, KRISHNAMURTHY VANDANA, WANG YUBAO
Year of Publication 21.01.2015
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Year of Publication 21.01.2015
Patent
SPIN-ON SPACER MATERIALS FOR DOUBLE- AND TRIPLE-PATTERNING LITHOGRAPHY
PULIGADDA RAMA, SMITH BRIAN, GUERRERO DOUGLAS J, LIN QIN, CLAYPOOL JAMES
Year of Publication 11.10.2011
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Year of Publication 11.10.2011
Patent