Search Results - "GU, Ja-Myung" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Endpoint Detection in Low Open Area TSV Fabrication Using Optical Emission Spectroscopy

Endpoint Detection in Low Open Area TSV Fabrication Using Optical Emission Spectroscopy

by Ja Myung Gu, Thadesar, Paragkumar A., Dembla, Ashish, Bakir, Muhannad S., May, Gary S., Sang Jeen Hong
Published in IEEE transactions on components, packaging, and manufacturing technology (2011) (01.07.2014)

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Journal Article

Novel photodefined polymer-clad through-silicon via technology integrated with endpoint detection using optical emission spectroscopy

Novel photodefined polymer-clad through-silicon via technology integrated with endpoint detection using optical emission spectroscopy

by Thadesar, Paragkumar A., Ja Myung Gu, Dembla, Ashish, Sang Jeen Hong, May, Gary S., Bakir, Muhannad S.
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)

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Conference Proceeding

Virtual metrology for TSV etch depth measurement using optical emission spectroscopy

Virtual metrology for TSV etch depth measurement using optical emission spectroscopy

by Ja Myung Gu, Sang Jeen Hong
Published in 2015 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS) (01.12.2015)

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Conference Proceeding

High-aspect ratio through-silicon vias for the integration of microfluidic cooling with 3D microsystems

High-aspect ratio through-silicon vias for the integration of microfluidic cooling with 3D microsystems

by Oh, Hanju, Gu, Ja Myung, Hong, Sang Jeen, May, Gary S., Bakir, Muhannad S.
Published in Microelectronic engineering (01.07.2015)

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Journal Article

Endpoint detection using optical emission spectroscopy in TSV fabrication

Endpoint detection using optical emission spectroscopy in TSV fabrication

by Ja Myung Gu, Thadesar, Paragkumar A., Dembla, Ashish, Sang Jeen Hong, Bakir, Muhannad S., May, Gary S.
Published in 2013 IEEE International Interconnect Technology Conference - IITC (01.06.2013)

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Conference Proceeding

Substrate treating apparatus and substrate treating method

Substrate treating apparatus and substrate treating method

by Arakelyan, Shant, Gu, Ja Myung
Year of Publication 22.10.2024

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Patent

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND PLASMA GENERATING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND PLASMA GENERATING METHOD

by Galstyan, Ogsen, Gu, Ja Myung, ARAKELYAN, Shant
Year of Publication 29.06.2023

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Patent

Substrate processing apparatus and method of manufacturing thereof

Substrate processing apparatus and method of manufacturing thereof

by An, Jong Hwan, Arakelyan, Shant, Gu, Ja Myung
Year of Publication 09.01.2024

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Patent

Device for multi-level pulsing, substrate processing apparatus including the same

Device for multi-level pulsing, substrate processing apparatus including the same

by Kim, Hyun Jin, Gu, Jung Mo, Park, Goon Ho, Gu, Ja Myung
Year of Publication 10.09.2024

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Patent

Substrate treating apparatus and impedance matching method

Substrate treating apparatus and impedance matching method

by Jo, Tae Hoon, Kim, Young Kuk, Park, Goon Ho, Gu, Ja Myung
Year of Publication 30.07.2024

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Patent

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

by Jo, Tae Hoon, AN, Chan Yong, Yoo, Sang Moon, Gu, Ja Myung
Year of Publication 06.07.2023

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Patent

Plasma processing apparatus and method of operating the same

Plasma processing apparatus and method of operating the same

by Jo, Tae Hoon, Gu, Jung Mo, Arakel Yan, Shant, Gu, Ja Myung
Year of Publication 06.09.2022

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Patent

DEVICE FOR MULTI-LEVEL PULSING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

DEVICE FOR MULTI-LEVEL PULSING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

by Kim, Hyun Jin, Gu, Jung Mo, Park, Goon Ho, Gu, Ja Myung
Year of Publication 02.06.2022

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Patent

Calibrator of an optical emission spectroscopy

Calibrator of an optical emission spectroscopy

by Lee, Hyung-Joo, Hwang, Jae-Woong, Gu, Ja-Myung, An, Jong-Hwan, Sun, Jong-Woo, Mun, Jeong-Il
Year of Publication 25.08.2020

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Patent

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

by GU, Ja Myung, ARAKELYAN, Shant
Year of Publication 30.06.2022

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Patent

SUBSTRATE PROCESSING APPARATUS, HARMONIC CONTROL UNIT AND HARMONIC CONTROL METHOD

SUBSTRATE PROCESSING APPARATUS, HARMONIC CONTROL UNIT AND HARMONIC CONTROL METHOD

by GU, Ja Myung, KIM, Hyung Joon, NA, Sae Won
Year of Publication 29.06.2023

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Patent

METHOD AND APPARATUS FOR DETERMINING CABLE LENGTH FOR PLASMA PROCESSING EQUIPMENT

METHOD AND APPARATUS FOR DETERMINING CABLE LENGTH FOR PLASMA PROCESSING EQUIPMENT

by SEONG, Hyo Seong, KIM, Ji Hyun, GU, Ja Myung, JO, Tae Hoon
Year of Publication 22.06.2023

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Patent

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING THEREOF

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING THEREOF

by AN, Jong Hwan, GU, Ja Myung, ARAKELYAN, Shant
Year of Publication 16.04.2020

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Patent

PLASMA PROCESSING APPARATUS AND METHOD OF OPERATING THE SAME

PLASMA PROCESSING APPARATUS AND METHOD OF OPERATING THE SAME

by ARAKEL YAN, Shant, GU, Ja Myung, GU, Jung Mo, JO, Tae Hoon
Year of Publication 31.12.2020

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Patent

CALIBRATOR OF AN OPTICAL EMISSION SPECTROSCOPY

CALIBRATOR OF AN OPTICAL EMISSION SPECTROSCOPY

by SUN, Jong-Woo, AN, Jong-Hwan, HWANG, Jae-Woong, MUN, Jeong-Il, LEE, Hyung-Joo, GU, Ja-Myung
Year of Publication 03.10.2019

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Patent