Gas sensor and method for the production thereof
PRUETZ ODD-AXEL, WEBER HERIBERT, SCHELLING CHRISTOPH, GRUEN DETLEF, KRUMMEL CHRISTIAN
Year of Publication 22.03.2007
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Year of Publication 22.03.2007
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GAS SENSOR AND METHOD OF MAKING SAME
PRUETZ ODD AXEL, WEBER HERIBERT, SCHELLING CHRISTOPH, GRUEN DETLEF, KRUMMEL CHRISTIAN
Year of Publication 23.05.2006
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Year of Publication 23.05.2006
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GAS SENSOR AND METHOD FOR THE PRODUCTION THEREOF
SCHELLING, CHRISTOPH, WEBER, HERIBERT, PRUETZ, ODD-AXEL, KRUMMEL, CHRISTIAN, GRUEN, DETLEF
Year of Publication 26.04.2006
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Year of Publication 26.04.2006
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Micromechanical component, specifically for membrane sensor, comprising substrate and membrane with height modulation over cavity in the substrate to improve mechanical robustness
SCHELLING, CHRISTOPH, WEBER, HERIBERT, FUERTSCH, MATTHIAS, GRUEN, DETLEF, KRAMER, TORSTEN, VERHOEVEN, HERBERT
Year of Publication 20.04.2006
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Year of Publication 20.04.2006
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Micromechanical device for e.g. air mass sensor, has reinforcement layer arranged in membrane to provide reinforcement in area of membrane edge, where membrane is made from dielectric layer, and layer is made from metal e.g. aluminum
SCHELLING, CHRISTOPH, HECHT, HANS, MUELLER-FIEDLER, ROLAND, WEBER, HERIBERT, FUERTSCH, MATTHIAS, GRUEN, DETLEF, KRAMER, TORSTEN, VERHOEVEN, HERBERT, SCHINK, RAINER
Year of Publication 01.02.2007
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Year of Publication 01.02.2007
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Membrane sensor
STRATMANN ANDREAS, MUELLER-FIEDLER ROLAND, BERNHARD WINFRIED, DUELL ANDREAS, WEBER HERIBERT, SCHELLING CHRISTOPH, MUCHOW JOERG, SCHINK RAINER, FUERTSCH MATTHIAS, GRUEN DETLEF, HECHT HANS, WAGNER ULRICH
Year of Publication 09.10.2007
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Year of Publication 09.10.2007
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Membrane sensor
Müller-Fiedler, Roland, Hecht, Hans, Muchow, Joerg, Fuertsch, Matthias, Stratmann, Andreas, Weber, Heribert, Bernhard, Winfried, Gruen, Detlef, Duell, Andreas, Schink, Rainer, Wagner, Ulrich, Schelling, Christoph
Year of Publication 09.10.2007
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Year of Publication 09.10.2007
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Membrane sensor
STRATMANN ANDREAS, MULLER-FIEDLER ROLAND, FUERTSCH MATTHHIAS, FUERTSCH JOERG, DUELL ANDREAS, SCHELLING CHRISTOP, WEBER HERIBERT, BERNHARD WINFRED, SCHINK RAINER, GRUEN DETLEF, HECHT HANS, WAGNER ULRICH
Year of Publication 07.09.2006
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Year of Publication 07.09.2006
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Micromechanical sensor element, especially for measuring fluid properties, has a surface structure that is to be placed in the fluid to be measured that includes a drainage structure for the deflection of dirt and impurities
SCHELLING, CHRISTOPH, HECHT, HANS, MUELLER-FIEDLER, ROLAND, REYMANN, KLAUS, WEBER, HERIBERT, FUERTSCH, MATTHIAS, GRUEN, DETLEF, KRAMER, TORSTEN, VERHOEVEN, HERBERT, SCHINK, RAINER
Year of Publication 06.07.2006
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Year of Publication 06.07.2006
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Massenflusssensor sowie Verfahren zur Herstellung
TREUTLER, CHRISTOPH, BAUMANN, HELMUT, LOCK, ANDREAS, GRUEN, DETLEF, SCHMIDT, STEFFEN, MUENZEL, HORST
Year of Publication 30.09.2010
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Year of Publication 30.09.2010
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Gas sensor with heated, resistive sensitive layer on membrane, is produced by depositing sensitive layer in droplet form
REIN, ERWIN, WEBER, HERIBERT, PRUETZ, ODD-AXEL, KRUMMEL, CHRISTIAN, SCHILLING, ULRICH, GRUEN, DETLEF, BAUER, MICHAEL, SEITER, MICHAEL
Year of Publication 24.10.2002
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Year of Publication 24.10.2002
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Mass flow sensor
BAUMANN; HELMUT, LOCK; ANDREAS, SCHMIDT; STEFFEN, TREUTLER; CHRISTOPH, MUENZEL; HORST, GRUEN; DETLEF
Year of Publication 06.01.1998
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Year of Publication 06.01.1998
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Membransersor
SCHELLING, CHRISTOPH, WAGNER, ULRICH, BERNHARD, WINFRIED, MUELLER-FRIEDLER, ROLAND, HECHT, HANS, MUCHOW, JEORG, WEBER, HERIBERT, FUERTSCH, MATTHIAS, GRUEN, DETLEF, STRATMANN, ANDREAS, DUELL, ANDREAS, SCHINK, RAINER
Year of Publication 21.10.2009
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Year of Publication 21.10.2009
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