Low temperature etching of Si in high density plasma using SF6/O2
BARTHA, J. W, GRESCHNER, J, PUECH, M, MAQUIN, P
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Conference Proceeding
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Low temperature etching of Si in high density plasma using SF 6/O 2
Bartha, Johann W., Greschner, Johann, Puech, M., Maquin, P.
Published in Microelectronic engineering (1995)
Published in Microelectronic engineering (1995)
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Year of Publication 10.07.2013
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Year of Publication 23.01.2013
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Year of Publication 29.11.2012
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Year of Publication 18.10.2011
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Year of Publication 18.10.2011
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Year of Publication 18.10.2011
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Year of Publication 28.09.2011
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Year of Publication 15.04.2011
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Year of Publication 15.04.2011
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Particle-optical arrangement with particle-optical component
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Year of Publication 23.03.2011
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Year of Publication 23.03.2011
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Year of Publication 26.01.2011
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Year of Publication 26.01.2011
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Year of Publication 26.01.2011
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Year of Publication 26.01.2011
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GRESCHNER, JOHANN, KEMEN, THOMAS, KNIPPELMEYER, RAINER, FRITZ, GEORG, CASARES, ANTONIO, KALT, SAMUEL, BAYER, THOMAS
Year of Publication 05.01.2011
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Year of Publication 05.01.2011
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GRESCHNER, JOHANN, KEMEN, THOMAS, KNIPPELMEYER, RAINER, FRITZ, GEORG, CASARES, ANTONIO, KALT, SAMUEL, BAYER, THOMAS
Year of Publication 05.01.2011
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Year of Publication 05.01.2011
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GRESCHNER, JOHANN, KEMEN, THOMAS, KNIPPELMEYER, RAINER, FRITZ, GEORG, CASARES, ANTONIO, KALT, SAMUEL, BAYER, THOMAS
Year of Publication 05.01.2011
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Year of Publication 05.01.2011
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Charged particle-optical component
GRESCHNER, JOHANN, KEMEN, THOMAS, KNIPPELMEYER, RAINER, FRITZ, GEORG, CASARES, ANTONIO, KALT, SAMUEL, BAYER, THOMAS
Year of Publication 29.12.2010
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Year of Publication 29.12.2010
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