PITCH REDUCTION TECHNOLOGY USING ALTERNATING SPACER DEPOSITIONS DURING THE FORMATION OF A SEMICONDUCTOR DEVICE AND SYSTEMS INCLUDING SAME
NIROOMAND ARDAVAN, MENG SHUANG, GREELEY JOSEPH N, ZHOU BAOSUO, ABATCHEV MIRZAFER K, MORGAN PAUL A, COPPA BRIAN J
Year of Publication 21.08.2012
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Year of Publication 21.08.2012
Patent