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Graef, Dieter, Blietz, Markus, Wahlich, Reinhold, Miller, Alfred, Zemke, Dirk
Year of Publication 04.12.2012
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Year of Publication 04.12.2012
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SOI wafer and method for producing it
ZEMKE DIRK, BLIETZ MARKUS, MILLER ALFRED, WAHLICH REINHOLD, GRAEF DIETER
Year of Publication 04.12.2012
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Year of Publication 04.12.2012
Patent
SOI wafer and method for producing it
ZEMKE DIRK, BLIETZ MARKUS, MILLER ALFRED, WAHLICH REINHOLD, GRAEF DIETER
Year of Publication 01.07.2008
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Year of Publication 01.07.2008
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SOI WAFER AND METHOD FOR PRODUCING IT
ZEMKE DIRK, BLIETZ MARKUS, MILLER ALFRED, WAHLICH REINHOLD, GRAEF DIETER
Year of Publication 26.06.2008
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Year of Publication 26.06.2008
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METHOD OF MANUFACTURING SILICON SEMICONDUCTOR WAFER HAVING LOW DEFECT DENSITY
KROTTENTHALER PETER, WAHLICH REINHOLD, LAMBERT ULRICH, VON AMMON WILFRIED, GRAEF DIETER
Year of Publication 03.03.2011
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Year of Publication 03.03.2011
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