Micro components manufacturing method, involves manufacturing three-dimensional master raw components of various shapes, and chemically, physically or mechanically separating master components and metal layer from micro component
GEMMLER, ARMIN, GOTTWALD, BERNHARD, FETZER, HANS-JOCHEN, KOCH, KAI UWE
Year of Publication 23.06.2005
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Year of Publication 23.06.2005
Patent