Electronic interface properties of silicon substrates after ozone based wet-chemical oxidation studied by SPV measurements
Angermann, Heike, Wolke, Klaus, Gottschalk, Christiane, Moldovan, Ana, Roczen, Maurizio, Fittkau, Jens, Zimmer, Martin, Rentsch, Jochen
Published in Applied surface science (15.08.2012)
Published in Applied surface science (15.08.2012)
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Journal Article
Conference Proceeding
Megasonic Enhanced Photoresist Strip with DiO3
Gottschalk, Christiane, Fittkau, Jens, Dussault, Don
Published in Solid state phenomena (01.09.2014)
Published in Solid state phenomena (01.09.2014)
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Journal Article
Multi Factorial Study of Megasonic Enhanced Photoresist Strip with DiO 3
Fittkau, Jens, Dussault, Donald, Gottschalk, Christiane, Vikström, Conny, Zenger, Tobias, Spreitzer, Johannes, Bouvot, Laurent
Published in ECS transactions (24.08.2016)
Published in ECS transactions (24.08.2016)
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Journal Article
Microvia Formation in 5- \mu \text -Thick Dry-Film Dielectric by Ozone Etch Processes
Suzuki, Yuya, Snyder, Eric, Ji, Chengxiang, Walther, Steve, Gupta, Atul, Gottschalk, Christiane, Sundaram, Venky, Tummala, Rao
Published in IEEE transactions on components, packaging, and manufacturing technology (2011) (01.12.2017)
Published in IEEE transactions on components, packaging, and manufacturing technology (2011) (01.12.2017)
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Journal Article
The Influence of Dissolved Carbon Dioxide on Cavitation Intensity in Ultrasound Cleaning Systems
Brems, Steven, Hauptmann, Marc, Camerotto, Elisabeth, Pacco, Antoine, Struyf, Herbert, Mertens, Paul, Gottschalk, Christiane, De Gendt, Stefan
Published in Japanese Journal of Applied Physics (01.06.2013)
Published in Japanese Journal of Applied Physics (01.06.2013)
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Journal Article
Multi Factorial Study of Megasonic Enhanced Photoresist Strip with DiO3
Fittkau, Jens, Dussault, Donald, Gottschalk, Christiane, Vikström, Conny, Zenger, Tobias, Spreitzer, Johannes, Bouvot, Laurent
Published in ECS transactions (24.08.2016)
Published in ECS transactions (24.08.2016)
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Journal Article
DEVICES, SYSTEMS, AND METHODS FOR CARBONATION OF DEIONIZED WATER
BRAMMER ULRICH, LOHR JOACHIM, SEIWERT JOHANNES, GOTTSCHALK CHRISTIANE
Year of Publication 11.10.2013
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Year of Publication 11.10.2013
Patent
Deoxification of Liquids for Advanced Semiconductors Processing
Gottschalk, Christiane, Brammer, Ulrich, Le Tiec, Yannick
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
DEVICES, SYSTEMS, AND METHODS FOR CARBONATION OF DEIONIZED WATER
BRAMMER ULRICH, LOHR JOACHIM, SEIWERT JOHANNES, GOTTSCHALK CHRISTIANE
Year of Publication 01.07.2009
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Year of Publication 01.07.2009
Patent
METHOD AND APPARATUS FOR A DIRECTLY ELECTRICALLY HEATED FLOW-THROUGH CHEMICAL REACTOR
GOTTSCHALK, Christiane, LOHR, Joachim, BLACHA, Martin, SEIWERT, Johannes
Year of Publication 17.04.2019
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Year of Publication 17.04.2019
Patent
First Demonstration of Photoresist Cleaning for Fine-Line RDL Yield Enhancement by an Innovative Ozone Treatment Process for Panel Fan-Out and Interposers
Gupta, Atul, Snyder, Eric, Gottschalk, Christiane, Wenzel, Kevin, Gunn, James, Hao Lu, Suzuki, Yuya, Sundaram, Venky, Tummala, Rao
Published in 2017 IEEE 67th Electronic Components and Technology Conference (ECTC) (01.05.2017)
Published in 2017 IEEE 67th Electronic Components and Technology Conference (ECTC) (01.05.2017)
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Conference Proceeding
De-Oxification of Liquids for Advanced Semiconductors Processing
Gottschalk, Christiane, Brammer, Ulrich, Le Tiec, Yannick
Published in Meeting abstracts (Electrochemical Society) (01.08.2011)
Published in Meeting abstracts (Electrochemical Society) (01.08.2011)
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Journal Article
METHOD AND APPARATUS FOR A DIRECTLY ELECTRICALLY HEATED FLOW-THROUGH CHEMICAL REACTOR
GOTTSCHALK, Christiane, LOHR, Joachim, BLACHA, Martin, SEIWERT, Johannes
Year of Publication 21.12.2016
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Year of Publication 21.12.2016
Patent