Drift reduction in a scanning electrostatic force microscope for surface profile measurement
Jia, Zhigang, Ito, So, Goto, Shigeaki, Hosobuchi, Keiichiro, Shimizu, Yuki, Gao, Wei
Published in Measurement science & technology (01.09.2014)
Published in Measurement science & technology (01.09.2014)
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Journal Article
On-machine form measurement of high precision ceramics parts by using a laser displacement sensor
ITO, So, MATSUURA, Daiki, MEGURO, Takayuki, GOTO, Shigeaki, SHIMIZU, Yuki, GAO, Wei, ADACHI, Shigeru, OMIYA, Kyohei
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2014)
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2014)
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Journal Article
Characterization of electrostatic force for scanning electrostatic force microscopy of micro-structured surface
Jia, Zhigang, Ito, So, Hosobuchi, Keiichiro, Goto, Shigeaki, Shimizu, Yuki, He, Gaofa, Gao, Wei
Published in International journal of precision engineering and manufacturing (01.09.2013)
Published in International journal of precision engineering and manufacturing (01.09.2013)
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Journal Article
INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND PROGRAM
NIIZUMA KENSHIRO, ABE MASAYUKI, OISHI TAKUYA, SASAKI JUNICHI, GOTO SHIGEAKI, SATAKE YUICHI
Year of Publication 12.05.2022
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Year of Publication 12.05.2022
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