Simultaneous observation of two dimensional electron gas and polarization in AlGaN/GaN heterostructure using scanning nonlinear dielectric microscopy
Hirose, Kotaro, Goto, Yasunori, Chinone, Norimichi, Cho, Yasuo
Published in Japanese Journal of Applied Physics (01.08.2016)
Published in Japanese Journal of Applied Physics (01.08.2016)
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Journal Article
Deep learning model for 3D profiling of high-aspect-ratio features using high-voltage CD-SEM
Sun, Wei, Goto, Yasunori, Yamamoto, Takuma, Hitomi, Keiichiro
Published in Japanese Journal of Applied Physics (01.06.2022)
Published in Japanese Journal of Applied Physics (01.06.2022)
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Journal Article
Depth-correlated backscattered electron signal intensity for 3D-profile measurement of high aspect ratio holes
Sun, Wei, Ohta, Hiroya, Ninomiya, Taku, Goto, Yasunori, Sohta, Yasunari
Published in Microscopy (09.10.2019)
Published in Microscopy (09.10.2019)
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Journal Article
CHARGED PARTICLE BEAM SYSTEM AND OVERLAY SHIFT AMOUNT MEASUREMENT METHOD
ASAO KAZUNARI, GOTO YASUNORI, TAMORI TOMOHIRO, YAMAKI TAKUMA, YAMAMOTO TAKUMA
Year of Publication 11.03.2022
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Year of Publication 11.03.2022
Patent
Defect analysis concerning variation in characteristics of PIN diode for Hybrid Vehicles
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Journal Article
Conference Proceeding