Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
SHICK, ROBERT, A, GOODALL, BRIAN, L, RHODES, LARRY, F, SAIKUMAR JAYARAMAN, JOHN-HENRY LIPIAN, ANDREW BELL
Year of Publication 24.12.2004
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Year of Publication 24.12.2004
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Dissolution rate modifiers for photoresist compositions
RHODES LARRY F, GOODALL BRIAN L, MCINTOSH LESTER H, SEGER LAWRENCE, DUFF ROBERT J
Year of Publication 04.11.2004
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Year of Publication 04.11.2004
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Photosensitive compositions based on polycyclic polymers
SUN SHENLIANG, MCDOUGALL W. C, RHODES LARRY F, HIRANO TAKASHI, JAYARAMAN SAIKUMAR, GOODALL BRIAN L, KROTINE JEFFREY C.JR, ELCE EDMUND
Year of Publication 27.07.2006
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Year of Publication 27.07.2006
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Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
Goodall, Brian L, Jayaraman, Saikumar, Shick, Robert A, Rhodes, Larry F
Year of Publication 14.09.2004
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Year of Publication 14.09.2004
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DISSOLUTION RATE MODIFIERS FOR PHOTORESIST COMPOSITIONS
DUFF, ROBERT, J, SEGER, LARRY, GOODALL, BRIAN, L, RHODES, LARRY, F, MCINTOSH, LESTER, H., III
Year of Publication 02.09.2004
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Year of Publication 02.09.2004
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Dissolution rate modifiers for photoresist compositions
RHODES LARRY F, GOODALL BRIAN L, MCINTOSH LESTER H, SEGER LAWRENCE, DUFF ROBERT J
Year of Publication 08.08.2012
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Year of Publication 08.08.2012
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POLYCYCLIC RESIST COMPOSITIONS WITH INCREASED ETCH RESISTANCE
RHODES, LARRY F, GOODALL, BRIAN L, JAYARAMAN, SAIKUMAR, OPTIZ, JULIANN, ALLEN, ROBERT D, SOORIYAKUMARAN, RATNAM, WALLOW, THOMAS, SCHICK, ROBERT A, VICARI, RICHARD
Year of Publication 30.11.2007
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Year of Publication 30.11.2007
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ADDTIONSPOLYMERE VON POLYCYCYCLOOLEFINEN MIT SILYL-FUNKTIONELLEN GRUPPEN
SHICK, ROBERT, A, GOODALL, BRIAN, L, JAYARAMAN, SAIKUMAR, MCINTOSH, LESTER, H., III
Year of Publication 15.03.2004
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Year of Publication 15.03.2004
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ADDITION POLYMERS OF POLYCYCLOOLEFINS CONTAINING SILYL FUNCTIONAL GROUPS
SHICK, ROBERT, A, GOODALL, BRIAN, L, JAYARAMAN, SAIKUMAR, MCINTOSH, LESTER, H., III
Year of Publication 18.02.2004
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Year of Publication 18.02.2004
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PHOTODEFINABLE DIELECTRIC COMPOSITIONS
SHICK, ROBERT, A, GOODALL, BRIAN, L, JAYARAMAN, SAIKUMAR, ELCE, EDMUND
Year of Publication 07.04.1999
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Year of Publication 07.04.1999
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