Modeling of stress-dependent wet etch characteristic for P-SOG STI process
Jeong-Guk Min, Sang-Ho Rha, Tai-Kyung Kim, Ui-Hui Kwon, Ju-Seon Goo, Young-kwan Park, Jeong-Taek Kong
Published in 2006 International Conference on Simulation of Semiconductor Processes and Devices (01.09.2006)
Published in 2006 International Conference on Simulation of Semiconductor Processes and Devices (01.09.2006)
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Conference Proceeding
Semiconductor device having trench isolation region and methods of fabricating the same
Byun, Kyung-Mun, Goo, Ju-Seon, Rha, Sang-Ho, Baek, Eun-Kyung, Choi, Jong-Wan
Year of Publication 24.08.2010
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Year of Publication 24.08.2010
Patent
Flash memory device and method of fabricating the same
Kim, Hong-Gun, Goo, Ju-Seon, Kim, Mun-Jun, Choi, Yong-Soon, Kim, Sung-Tae, Baek, Eun-Kyung
Year of Publication 30.11.2010
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Year of Publication 30.11.2010
Patent
Semiconductor device isolation structures and methods of fabricating such structures
Choi, Jong-Wan, Goo, Ju-Seon, Kim, Hong-Gun, Choi, Yong-Soon, Kim, Sung-Tae, Baek, Eun-Kyung
Year of Publication 09.03.2010
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Year of Publication 09.03.2010
Patent
Methods of forming trench isolation layers using high density plasma chemical vapor deposition
Cha, Yong-Won, Na, Kyu-Tae, Choi, Yong-Soon, Hong, Eunkee, Goo, Ju-Seon
Year of Publication 19.02.2008
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Year of Publication 19.02.2008
Patent
Method of forming an insulating layer in a trench isolation type semiconductor device
Hong, Soo-Jin, Park, Moon-Han, Goo, Ju-Seon, Heo, Jin-Hwa, Kim, Hong-Gun, Hong, Eun-Kee
Year of Publication 20.05.2003
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Year of Publication 20.05.2003
Patent
Method of forming an insulating layer in a trench isolation type semiconductor device
Park, Moon-Han, Hong, Soo-Jin, Goo, Ju-Seon, Heo, Jin-Hwa, Kim, Hong-Gun, Hong, Eun-Kee
Year of Publication 05.09.2002
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Year of Publication 05.09.2002
Patent