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"GOO, HEEJAE"
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Current Monitoring-based Diagnosis of Drive Belt Degradation in Wafer-handling Robots
by
Goo
,
Heejae
,
Lee, Geunil
,
Kwon, Daeil
Published in
International journal of precision engineering and manufacturing
(02.11.2024)
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substrate processing apparatus
by
JEON JAE SIK
,
KIM DAESUNG
,
GOO HEEJAE
Year of Publication
02.03.2020
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Unit for supplying liquid Apparatus and Method for treating substrate
by
PARK EUNWOO
,
KIM DAESUNG
,
GOO HEEJAE
,
YOON KYO SANG
Year of Publication
22.12.2020
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Method and apparatus for treating substrate
by
CHOI BYOUNGDOO
,
GOO HEEJAE
,
YANG SANGMO
,
YOON KYO SANG
Year of Publication
24.10.2019
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METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
by
GOO
,
HEEJAE
,
CHOI, BYOUNGDOO
,
YOON, KYO SANG
,
YANG, SANGMO
Year of Publication
17.10.2019
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Method and apparatus for treating substrate
by
CHOI BYOUNGDOO
,
GOO HEEJAE
,
YANG SANGMO
,
YOON KYO SANG
Year of Publication
29.10.2019
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