Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component
Tebje Lars, Gonska Jullian, Heuck Friedjof, Stahl Heiko, Neul Reinhard
Year of Publication 30.08.2016
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Year of Publication 30.08.2016
Patent
Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component
HEUCK FRIEDJOF, GONSKA JULLIAN, NEUL REINHARD, TEBJE LARS, STAHL HEIKO
Year of Publication 10.12.2015
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Year of Publication 10.12.2015
Patent