Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
Mills, Lynne K, Waeterloos, Joost J. M, Wilson, Larry R, Shaffer, Edward O. II, Townsend, Paul H. III, Gombar-Fetner, Sheila, Hetzner, Jack E, Howard, Kevin E
Year of Publication 24.05.2017
Get full text
Year of Publication 24.05.2017
Patent
Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
HETZNER, JACK E, TOWNSEND, PAUL H. III, WAETERLOOS, JOOST J. M, SHAFFER, EDWARD O. II, MILLS, LYNNE K, HOWARD, KEVIN E, WILSON, LARRY R, GOMBAR-FETNER, SHEILA
Year of Publication 02.04.2008
Get full text
Year of Publication 02.04.2008
Patent
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
WAETERLOOS JOOST J. M, TOWNSEND PAUL H, WILSON LARRY R.?, MILLS LYNNE K, GOMBAR-FETNER SHEILA, HETZNER JACK E, SHAFFER EDWARD O, HOWARD KEVIN E
Year of Publication 07.08.2013
Get full text
Year of Publication 07.08.2013
Patent
Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
HETZNER, JACK E, TOWNSEND, PAUL H. III, WAETERLOOS, JOOST J. M, SHAFFER, EDWARD O. II, MILLS, LYNNE K, HOWARD, KEVIN E, WILSON, LARRY R, GOMBAR-FETNER, SHEILA
Year of Publication 26.09.2007
Get full text
Year of Publication 26.09.2007
Patent
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
WAETERLOOS JOOST J. M, SHAFFER, II EDWARD O, TOWNSEND, III PAUL H, WILSON LARRY R, MILLS LYNNE K, GOMBAR-FETNER SHEILA, HETZNER JACK E, HOWARD KEVIN E
Year of Publication 03.10.2006
Get full text
Year of Publication 03.10.2006
Patent
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
Shaffer, II, Edward O, Howard, Kevin E, Waeterloos, Joost J. M, Hetzner, Jack E, Townsend, III, Paul H, Mills, Lynne K, Gombar-Fetner, Sheila, Wilson, Larry R
Year of Publication 03.10.2006
Get full text
Year of Publication 03.10.2006
Patent
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
TOWNSEND PAUL H, WILSON LARRY R, MILLS LYNNE K, GOMBAR-FETNER SHEILA, WAETERLOOS JOOST J.M, HETZNER JACK E, SHAFFER EDWARD O, HOWARD KEVIN E
Year of Publication 02.05.2002
Get full text
Year of Publication 02.05.2002
Patent
ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN THE FABRICATION OF MICROELECTRONIC DEVICES
HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M
Year of Publication 28.05.2003
Get full text
Year of Publication 28.05.2003
Patent
ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN FABRICATION OF MICROELECTRONIC DEVICES
HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M
Year of Publication 27.12.2002
Get full text
Year of Publication 27.12.2002
Patent
ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN FABRICATION OF MICROELECTRONIC DEVICES
HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M
Year of Publication 28.02.2002
Get full text
Year of Publication 28.02.2002
Patent