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Year of Publication 09.09.2013
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Year of Publication 16.10.2014
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Year of Publication 28.06.2011
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Year of Publication 28.03.2013
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METHOD AND APPARATUS FOR GAS FLOW MEASUREMENT
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Year of Publication 19.08.2010
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METHODS AND APPARATUS FOR REDUCING FLOW SPLITTING ERRORS USING ORIFICE RATIO CONDUCTANCE CONTROL
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Year of Publication 07.03.2013
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Year of Publication 07.03.2013
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Methods and apparatus for providing a gas mixture to a pair of process chambers
Lee Jared Ahmad, Cruse James P, Salinas Martin Jeffrey, Gold Ezra Robert
Year of Publication 07.03.2017
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Year of Publication 07.03.2017
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Methods and apparatus for rapidly responsive heat control in plasma processing devices
BALAKRISHNA AJIT, FOVELL RICHARD, CRUSE JAMES P, GOLD EZRA ROBERT, ZHANG CHUNLEI
Year of Publication 06.10.2015
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Year of Publication 06.10.2015
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