Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography
Vogler, Marko, Wiedenberg, Sabine, Mühlberger, Michael, Bergmair, Iris, Glinsner, Thomas, Schmidt, Holger, Kley, Ernst-Bernhard, Grützner, Gabi
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Conference Proceeding
APPARATUS AND METHOD FOR EMBOSSING MICRO- AND/OR NANOSTRUCTURE
ZAGLMAYR HARALD, REISINGER EVELYN, LINDNER FRIEDRICH PAUL, FISCHER PETER, GLINSNER THOMAS, SCHON CHRISTIAN, LUKSCH OTHMAR
Year of Publication 12.08.2024
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Year of Publication 12.08.2024
Patent
APPARATUS AND METHOD FOR EMBOSSING MICRO- AND/OR NANOSTRUCTURE
ZAGLMAYR HARALD, REISINGER EVELYN, LINDNER FRIEDRICH PAUL, FISCHER PETER, GLINSNER THOMAS, SCHON CHRISTIAN, LUKSCH OTHMAR
Year of Publication 03.05.2022
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Year of Publication 03.05.2022
Patent
Scanning probe-based high-accuracy overlay alignment concept for lithography applications
Ishchuk, Valentyn, Guliyev, Elshad, Aydogan, Cemal, Buliev, Ivan, Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Reum, Alexander, Lenk, Steve, Lenk, Claudia, Nikolov, Nikolay, Glinsner, Thomas, Rangelow, Ivo W.
Published in Applied physics. A, Materials science & processing (2017)
Published in Applied physics. A, Materials science & processing (2017)
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마이크로구조물 및/또는 나노구조물 엠보싱 방법 및 시스템
ZAGLMAYR HARALD, REISINGER EVELYN, LINDNER FRIEDRICH PAUL, FISCHER PETER, GLINSNER THOMAS, SCHON CHRISTIAN, LUKSCH OTHMAR
Year of Publication 07.05.2019
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Year of Publication 07.05.2019
Patent
Monolithic IC integration key alignment aspects for high process yield
Uhrmann, Thomas, Wagenleitner, Thomas, Glinsner, Thomas, Wimplinger, Markus, Lindner, Paul
Published in 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (01.10.2014)
Published in 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (01.10.2014)
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Conference Proceeding
Method and Device for Plasma Treatment of Substrates
BERNAUER JOHANN, SCHMID FLORIAN, NONES ALEXANDER, GLINSNER THOMAS, WAGENLEITNER THOMAS, WIESER THOMAS, KRIEBISCH UWE, PLACH THOMAS, FLOTGEN CHRISTOPH, ANZENGRUBER ROMAN
Year of Publication 06.01.2017
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Year of Publication 06.01.2017
Patent
Comparison of multilayer stamp concepts in UV–NIL
Plachetka, Ulrich, Bender, Markus, Fuchs, Andreas, Wahlbrink, Thorsten, Glinsner, Thomas, Kurz, Heinrich
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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DEVICE AND METHOD FOR LOOSENING A POLYMER LAYER FROM A SURFACE OF A SUBSTRATE
THALLNER ERICH, LINDNER PAUL, CROWDER MATT, GLINSNER THOMAS, HOLZLEITNER RONALD
Year of Publication 04.11.2011
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Year of Publication 04.11.2011
Patent
Chemometric evaluation of concentration profiles from compounds relevant in beer ageing
VARMUZA, Kurt, STEINER, Ingrid, GLINSNER, Thomas, KLEIN, Helmut
Published in European food research & technology (01.09.2002)
Published in European food research & technology (01.09.2002)
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