Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator
Rodriguez, Janna, Chandorkar, Saurabh A., Watson, Christopher A., Glaze, Grant M., Ahn, C. H., Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.
Published in Scientific reports (19.02.2019)
Published in Scientific reports (19.02.2019)
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Journal Article
Direct Detection of Anchor Damping in MEMS Tuning Fork Resonators
Rodriguez, Janna, Chandorkar, Saurabh Arun, Glaze, Grant M., Gerrard, Dustin D., Chen, Yunhan, Heinz, David B., Flader, Ian B., Kenny, Thomas W.
Published in Journal of microelectromechanical systems (01.10.2018)
Published in Journal of microelectromechanical systems (01.10.2018)
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Journal Article
Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator
Rodriguez, Janna, Chandorkar, Saurabh A., Watson, Christopher A., Glaze, Grant M., Ahn, C. H., Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.
Published in Scientific reports (19.02.2019)
Get full text
Published in Scientific reports (19.02.2019)
Journal Article
Direct measurements of anchor damping in MEMS resonators
Rodriguez, Janna, Gerrard, Dustin D., Glaze, Grant M., Chandorkar, Saurabh, Comenecia, Lizmarie, Yunhan Chen, Flader, Ian B., Kenny, Thomas W.
Published in 2017 IEEE SENSORS (01.10.2017)
Published in 2017 IEEE SENSORS (01.10.2017)
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Conference Proceeding
Investigation of Orientation Dependence of the Thermal Expansion Coefficient in Silicon MEMS Resonators
Rodriguez, Janna, Vukasin, Gabrielle D., Glaze, Grant M., Hopcroft, Matthew A., Comenencia Ortiz, Lizmarie, Ahn, Chae H., Ng, Eldwin, Park, Woosung, Kenny, Thomas W., Watson, Christopher A.
Published in 2018 IEEE International Frequency Control Symposium (IFCS) (01.05.2018)
Published in 2018 IEEE International Frequency Control Symposium (IFCS) (01.05.2018)
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Conference Proceeding
Unanticipated results in the first direct measurements of anchor damping in MEMS resonators
Rodriguez, Janna, Gerrard, Dustin D., Glaze, Grant M., Chandorkar, Saurabh, Chen, Yunhan, Flader, Ian B., Shin, Dongsuk D., Kenny, Thomas W.
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding