Interface board, inspection system and installation method of inspection system
GLASSMAN, JOHN, H, BAGGEN MARCEL KOENRAAD MARIE, TU JINFA, KUINDERSMA, LUDGER
Year of Publication 11.11.2022
Get full text
Year of Publication 11.11.2022
Patent
Platform for charged particle device and components within charged particle device
PHILLIPS PAUL PETER HENRI HUBERTUS, SANS MERCADE JORGE, HEMPENIUS PETER PAUL, BOSCH NIELS JOHANNES MARIA, GLASSMAN, JOHN, H, SASS GARY WILLIAM, BUTLER HANS, URBANUS WILLIAM HENRY
Year of Publication 09.07.2024
Get full text
Year of Publication 09.07.2024
Patent
Bifocal solution for SEM metrology tool
HEMPENIUS PETER PAUL, WANG XU, SUI JIANZHI, BOSCH NIELS JOHANNES MARIA, WANG YONGQIANG, WANG YOUJIN, GLASSMAN, JOHN, H, BUTLER HANS, CHEN TIANMING, WU AIMIN
Year of Publication 22.09.2023
Get full text
Year of Publication 22.09.2023
Patent