Ultrathin Ni Silicides With Low Contact Resistance on Strained and Unstrained Silicon
Knoll, L., Zhao, Q.T., Habicht, S., Urban, C., Ghyselen, B., Mantl, S.
Published in IEEE electron device letters (01.04.2010)
Published in IEEE electron device letters (01.04.2010)
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Journal Article
Electrical characterization of strained and unstrained silicon nanowires with nickel silicide contacts
Habicht, S, Zhao, Q T, Feste, S F, Knoll, L, Trellenkamp, S, Ghyselen, B, Mantl, S
Published in Nanotechnology (12.03.2010)
Published in Nanotechnology (12.03.2010)
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Journal Article
Two-dimensional photonic crystals with pure germanium-on-insulator
El Kurdi, M., David, S., Checoury, X., Fishman, G., Boucaud, P., Kermarrec, O., Bensahel, D., Ghyselen, B.
Published in Optics communications (15.02.2008)
Published in Optics communications (15.02.2008)
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Journal Article
Realization and characterization of thin single crystal Ge films on sapphire
Bogumilowicz, Y, Abbadie, A, Klinger, V, Benaissa, L, Gergaud, P, Rouchon, D, Maurois, C, Lecouvey, C, Blanc, N, Charles-Alfred, C, Drouin, A, Ghyselen, B, Wekkeli, A, Dimroth, F, Carron, V
Published in Semiconductor science and technology (01.03.2013)
Published in Semiconductor science and technology (01.03.2013)
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Journal Article
The generic nature of the Smart-Cut® process for thin film transfer
ASPAR, B, MORICEAU, H, LETERTRE, F, RAYSSAC, O, BARGE, T, MALEVILLE, C, GHYSELEN, B, JALAGUIER, E, LAGAHE, C, SOUBIE, A, BIASSE, B, PAPON, A. M, CLAVERIE, A, GRISOLIA, J, BENASSAYAG, G
Published in Journal of electronic materials (01.07.2001)
Published in Journal of electronic materials (01.07.2001)
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Journal Article
Deep-amorphization and solid-phase epitaxial regrowth processes for hybrid orientation technologies in SOI MOSFETs with thin body
Ohata, A., Bae, Y., Cristoloveanu, S., Signamarcheix, T., Widiez, J., Ghyselen, B., Faynot, O., Clavelier, L.
Published in Microelectronics and reliability (01.11.2012)
Published in Microelectronics and reliability (01.11.2012)
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Journal Article
Improved GeOI substrates for pMOSFET off-state leakage control
Romanjek, K., Augendre, E., Van Den Daele, W., Grandchamp, B., Sanchez, L., Le Royer, C., Hartmann, J.-M., Ghyselen, B., Guiot, E., Bourdelle, K., Cristoloveanu, S., Boulanger, F., Clavelier, L.
Published in Microelectronic engineering (01.07.2009)
Published in Microelectronic engineering (01.07.2009)
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Conference Proceeding
Germanium-based nanophotonic devices: Two-dimensional photonic crystals and cavities
Boucaud, P., El Kurdi, M., David, S., Checoury, X., Li, X., Ngo, T.-P., Sauvage, S., Bouchier, D., Fishman, G., Kermarrec, O., Campidelli, Y., Bensahel, D., Akatsu, T., Richtarch, C., Ghyselen, B.
Published in Thin solid films (03.11.2008)
Published in Thin solid films (03.11.2008)
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Conference Proceeding
Performance of (1 1 0) p-channel SOI-MOSFETs fabricated by deep-amorphization and solid-phase epitaxial regrowth processes
Ohata, A., Bae, Y., Signamarcheix, T., Widiez, J., Ghyselen, B., Faynot, O., Clavelier, L., Cristoloveanu, S.
Published in Microelectronic engineering (01.07.2011)
Published in Microelectronic engineering (01.07.2011)
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Journal Article
Conference Proceeding
Fully depleted silicon on insulator MOSFETs on (1 1 0) surface for hybrid orientation technologies
Signamarcheix, T., Andrieu, F., Biasse, B., Cassé, M., Papon, A.-M., Nolot, E., Ghyselen, B., Faynot, O., Clavelier, L.
Published in Solid-state electronics (01.05.2011)
Published in Solid-state electronics (01.05.2011)
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Journal Article
Conference Proceeding
Resonant cavity enhanced Ge photodetectors for 1550 nm operation on reflecting Si substrates
Dosunmu, O.I., Cannon, D.D., Emsley, M.K., Ghyselen, B., Jifeng Liu, Kimerling, L.C., Unlu, M.S.
Published in IEEE journal of selected topics in quantum electronics (01.07.2004)
Published in IEEE journal of selected topics in quantum electronics (01.07.2004)
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Journal Article
Stress Hybridization for Multigate Devices Fabricated on Supercritical Strained-SOI (SC-SSOI)
Collaert, N., Rooyackers, R., De Keersgieter, A., Leys, F.E., Cayrefourcq, I., Ghyselen, B., Loo, R., Jurczak, M.
Published in IEEE electron device letters (01.07.2007)
Published in IEEE electron device letters (01.07.2007)
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Journal Article
Piezoresponse Force Microscopy study of a single-crystal LiTaO3 thin film obtained by the Smart Cut™ technology
Brugere, A, Moulet, J S, Gidon, S, Tchelnokov, A, Deguet, C, Clavelier, L, Ghyselen, B, Gautier, B
Published in 2010 IEEE International Symposium on the Applications of Ferroelectrics (ISAF) (01.08.2010)
Published in 2010 IEEE International Symposium on the Applications of Ferroelectrics (ISAF) (01.08.2010)
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Conference Proceeding
Ultra-thin strained SOI substrate analysis by pseudo-MOS measurements
Gallon, C., Fenouillet-Beranger, C., Bresson, N., Cristoloveanu, S., Allibert, F., Bord, S., Aulnette, C., Delille, D., Latu-Romain, E., Hartmann, J.M., Ernst, T., Andrieu, F., Campidelli, Y., Ghyselen, B., Cayrefourcq, I., Fournel, F., Kernevez, N., Skotnicki, T.
Published in Microelectronic engineering (01.06.2005)
Published in Microelectronic engineering (01.06.2005)
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Conference Proceeding
Papers from the 3rd International SiGe Technology and Device Meeting (Princeton, New Jersey, USA, 15–17 May 2006) (ISTDM 2006)
Sturm, J, Fitzgerald, E, Koester, S, Kolodzey, J, Murota, J, Paul, D, Tillack, B, Zaima, S, Ghyselen, B, Takagi, S
Published in Semiconductor science and technology (01.01.2007)
Published in Semiconductor science and technology (01.01.2007)
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Journal Article
Performance and physics of sub-50 nm strained Si on Si1-xGex-on-insulator (SGOI) nMOSFETs
ANDRIEU, F, ERNST, T, FOURNEL, F, GHIBAUDO, G, DELEONIBUS, S, FAYNOT, O, ROZEAU, O, BOGUMILOWICZ, Y, HARTMANN, J.-M, BREVARD, L, TOFFOLI, A, LAFOND, D, GHYSELEN, B
Published in Solid-state electronics (01.04.2006)
Published in Solid-state electronics (01.04.2006)
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Conference Proceeding
New layer transfers obtained by the SmartCut process
MORICEAU, H, FOURNEL, F, SOUBIE, A, BIASSE, B, SOUSBIE, N, SARTORI, S, MICHAUD, J. F, LETERTRE, F, RAYSSAC, O, CAYREFOURCQ, I, RICHTARCH, C, DAVAL, N, ASPAR, B, AULNETTE, C, AKATSU, T, OSTERNAUD, B, GHYSELEN, B, MAZURE, C, BATAILLOU, B, BEAUMONT, A, MORALES, C, CARTIER, A. M, POCAS, S, LAGAHE, C, JALAGUIER, E
Published in Journal of electronic materials (01.08.2003)
Published in Journal of electronic materials (01.08.2003)
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Conference Proceeding
Journal Article
Strain characterization of strained silicon on insulator wafers
Paillard, V, Ghyselen, B, Aulnette, C, Osternaud, B, Daval, N, Fournel, F, Moriceau, H, Ernst, T, Hartmann, J.M, Lagahe-Blanchard, C, Pocas, S, Leduc, P, Vincent, L, Cristiano, F, Campidelli, Y, Kermarrec, O, Besson, P, Morand, Y
Published in Microelectronic engineering (01.04.2004)
Published in Microelectronic engineering (01.04.2004)
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Conference Proceeding
In-depth study of strained SGOI nMOSFETs down to 30nm gate length
Andrieu, F., Ernst, T., Faynot, O., Rozeau, O., Bogumilowicz, Y., Hartmann, J.-M., Brevard, L., Toffoli, A., Lafond, D., Dansas, H., Ghyselen, B., Fournel, F., Ghibaudo, G., Deleonibus, S.
Published in Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005 (2005)
Published in Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005 (2005)
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Conference Proceeding
Boron activation and diffusion in silicon and strained silicon-on-insulator by rapid thermal and flash lamp annealings
Lanzerath, F., Buca, D., Trinkaus, H., Goryll, M., Mantl, S., Knoch, J., Breuer, U., Skorupa, W., Ghyselen, B.
Published in Journal of applied physics (15.08.2008)
Published in Journal of applied physics (15.08.2008)
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