BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCTURES FOR EPITAXIAL DEPOSITION OPERATIONS
SALINAS, Martin Jeffrey, MORADIAN, Ala, GHAZAL, Peydaye Saheli, DHAMODHARAN, Raja Murali, SUBBANNA, Manjunath, LAU, Shu-Kwan, PATIL, Aniketnitin, SANCHEZ, Errol Antonio C, ZHU, Zuoming
Year of Publication 18.01.2024
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Year of Publication 18.01.2024
Patent
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCTURES FOR EPITAXIAL DEPOSITION OPERATIONS
SALINAS, Martin Jeffrey, MORADIAN, Ala, GHAZAL, Peydaye Saheli, DHAMODHARAN, Raja Murali, SUBBANNA, Manjunath, LAU, Shu-Kwan, PATIL, Aniketnitin, SANCHEZ, Errol Antonio C, ZHU, Zuoming
Year of Publication 18.01.2024
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Year of Publication 18.01.2024
Patent
Batch processing apparatus, systems, and related methods and structures for epitaxial deposition operations
DHAMODHARAN, RAJA MURALI, SALINAS, MARTIN JEFFREY, LAU, SHU-KWAN, PATIL, ANIKETNITIN, SANCHEZ, ERROL ANTONIO C, ZHU, ZUOMING, MORADIAN, ALA, SUBBANNA, MANJUNATH, GHAZAL, PEYDAYE SAHELI
Year of Publication 16.01.2024
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Year of Publication 16.01.2024
Patent