EPI chamber with full wafer laser heating
Tannous, Adel George, Lau, Shu-Kwan Danny, Genis, Patrick C, Ye, Zhiyuan
Year of Publication 09.07.2024
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Year of Publication 09.07.2024
Patent
EPI CHAMBER WITH FULL WAFER LASER HEATING
LAU, Shu-Kwan Danny, GENIS, Patrick C, TANNOUS, Adel George, YE, Zhiyuan
Year of Publication 03.03.2022
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Year of Publication 03.03.2022
Patent