EUV 용기 및 EUV 콜렉터의 타겟 재료 잔해 세정을 위한 시스템, 방법 및 장치
GAZZA JACK MICHAEL, BAEK JONGHOON, ABRAHAM MATHEW CHEERAN, EVANS DAVID ROBERT
Year of Publication 19.09.2018
Get full text
Year of Publication 19.09.2018
Patent
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
Baek Jonghoon, Evans David Robert, Gazza Jack Michael, Abraham Mathew Cheeran
Year of Publication 06.02.2018
Get full text
Year of Publication 06.02.2018
Patent
Euv light source for cleaning target material debris deposits therein
EVANS, DAVID ROBERT, GAZZA, JACK MICHAEL, ABRAHAM, MATHEW CHEERAN, BAEK, JONGHOON
Year of Publication 11.08.2022
Get full text
Year of Publication 11.08.2022
Patent
System, Method and Apparatus for Target Material Debris Cleaning of EUV Vessel and EUV Collector
Baek Jonghoon, Evans David Robert, Gazza Jack Michael, Abraham Mathew Cheeran
Year of Publication 27.07.2017
Get full text
Year of Publication 27.07.2017
Patent
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
GAZZA JACK MICHAEL, BAEK JONGHOON, ABRAHAM MATHEW CHEERAN, EVANS DAVID ROBERT
Year of Publication 31.08.2018
Get full text
Year of Publication 31.08.2018
Patent
ELECTROSTATIC APPLICATION OF POWDER MATERIAL TO SOLID DOSAGE FORMS
JACK, MICHAEL GAZZA, DOUGLAS, HOWARD NELSON, MARSHALL WHITEMAN, DAVID, HOOVER FEATHER, MARTIN, DAVID HALLETT
Year of Publication 31.01.2007
Get full text
Year of Publication 31.01.2007
Patent
ELEKTROSTATISCHER PULVERAUFTRAG AUF FESTE DOSIERUNGSFORMEN
WHITEMAN, MARSHALL, FEATHER, DAVID, HOOVER, HALLETT, MARTIN, DAVID, GAZZA, JACK, MICHAEL, NELSON, DOUGLAS, HOWARD
Year of Publication 15.11.2006
Get full text
Year of Publication 15.11.2006
Patent