RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
LOOPSTRA ERIK ROELOF, BANINE VADIM YEVGENYEVICH, KOLOSHNIKOV VSEVOLOD GRIGOREVITCH, GAYAZOV ROBERT RAFILEVITCH, KRIVTSUN VLADIMIR MIHAILOVITCH, SIDELKOV YURII VICTOROVITCH, STEVENS LUCAS HENRICUS JOHANNES, KIEFT ERIK RENE, IVANOV VLADIMIR VITAL'EVITCH, FRIJNS OLAV WALDEMAR VLADIMIR, KOSHELEV KONSTANTIN NIKOLAEVITCH
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Year of Publication 24.03.2004
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VORRICHTUNG ZUR ERZEUGUNG VON STRAHLUNG, LITHOGRAPHIEGERÄT, VERFAHREN ZUR HERSTELLUNG EINES BAUTEILS UND DIESES
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Year of Publication 15.10.2010
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Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured
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Year of Publication 22.09.2010
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Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
IVANOV VLADIMIR VITALEVITCH, BANINE VADIM YEVGENYEVICH, GAYAZOV ROBERT RAFILEVITCH, KRIVTSUN VLADIMIR MIHAILOVITCH, KOSHELEV KONSTANTIN NIKOLAEVITCH
Year of Publication 09.12.2008
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Year of Publication 09.12.2008
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Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
Banine, Vadim Yevgenyevich, Ivanov, Vladimir Vitalevitch, Koshelev, Konstantin Nikolaevitch, Gayazov, Robert Rafilevitch, Krivtsun, Vladimir Mihailovitch
Year of Publication 09.12.2008
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Year of Publication 09.12.2008
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Lithographic apparatus, radiation system and device manufacturing method
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Year of Publication 13.09.2011
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Year of Publication 13.09.2011
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Lithographic apparatus, radiation system and device manufacturing method
IVANOV VLADIMIR VITALEVITCH, SIDELNIKOV YURII VICTOROVITCH, GAYAZOV ROBERT RAFILEVITCH, BANINE VADIM YEVGENYEVICH, ZUKAVISHVILI GIVI GEORGIEVITCH, KOROB EVGENII DMITREEVITCH, KOSHELEV KONSTANTIN NIKOLAEVITCH
Year of Publication 13.09.2011
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Year of Publication 13.09.2011
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Radiation source, lithographic apparatus, and device manufacturing method
KRIVTSUN, VLADIMIR MIHAILOVITCH, KOLOSHNIKOV, VSEVOLOD GRIGOREVITCH, LOOPSTRA, ERIK ROELOF, SIDELKOV, YURII VICTOROVITCH, KOSHELEV, KONSTANTIN NIKOLAEVITCH, IVANOV, VLADIMIR VITAL'EVITCH, BANINE, VADIM YEVGENYEVICH, KIEFT, ERIK RENE, STEVENS, LUCAS HENRICUS, JOHANNES, FRIJNS, OLAV WALDEMAR VLADIMIR, GAYAZOV, ROBERT RAFILEVITCH
Year of Publication 25.07.2012
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Year of Publication 25.07.2012
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Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured
KRIVTSUN, VLADIMIR MIHAILOVITCH, KOROB, EVGENII DMITREEVITCH, KOSHELEV, KONSTANTIN NIKOLAEVITCH, IVANOV, VLADIMIR VITALEVITCH, GAYAZOV, ROBERT RAFILEVITCH, ZUKAVISHVILI, GIVI GEORGIEVITCH
Year of Publication 03.12.2008
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Year of Publication 03.12.2008
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Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
Koshelev, Konstantin Nikolaevitch, Ivanov, Vladimir Vitalevitch, Korob, Evgenii Dmitreevitch, Zukavishvili, Givi Georgievitch, Gayazov, Robert Rafilevitch, Krivtsun, Vladimir Mihailovitch
Year of Publication 26.02.2008
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Year of Publication 26.02.2008
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Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
IVANOV VLADIMIR VITALEVITCH, GAYAZOV ROBERT RAFILEVITCH, KRIVTSUN VLADIMIR MIHAILOVITCH, ZUKAVISHVILI GIVI GEORGIEVITCH, KOROB EVGENII DMITREEVITCH, KOSHELEV KONSTANTIN NIKOLAEVITCH
Year of Publication 26.02.2008
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Year of Publication 26.02.2008
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Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
IVANOV VLADIMIR VITALEVITCH, GAYAZOV ROBERT RAFILEVITCH, KRIVTSUM VLADIMIR MIHAILOVITCH, ZUKAVISHVILI GIVI GEORGIEVITCH, KOROB EVGENII DMITREEVITCH, KOSHELEV KONSTANTIN NIKOLAEVITCH
Year of Publication 24.04.2007
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Year of Publication 24.04.2007
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Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
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Year of Publication 24.04.2007
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Year of Publication 24.04.2007
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RADIATION GENERATING DEVICE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY
IVANOV VLADIMIR VITALEVITCH, GAYAZOV ROBERT RAFILEVITCH, KRIVTSUN VLADIMIR MIHAILOVITCH, ZUKAVISHVILI GIVI GEORGIEVITCH, KOROB EVGENII DMITREEVITCH, KOSHELEV KONSTANTIN NIKOLAEVITCH
Year of Publication 19.05.2006
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Year of Publication 19.05.2006
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Radiation source, lithographic apparatus, and device manufacturing method
KRIVTSUN, VLADIMIR MIHAILOVITCH, KOLOSHNIKOV, VSEVOLOD GRIGOREVITCH, LOOPSTRA, ERIK ROELOF, SIDELKOV, YURII VICTOROVITCH, KOSHELEV, KONSTANTIN NIKOLAEVITCH, IVANOV, VLADIMIR VITAL'EVITCH, STEVENS, LUCAS HENRICUS JOHANNES, BANINE, VADIM YEVGENYEVICH, KIEFT, ERIK RENE, FRIJNS, OLAV WALDEMAR VLADIMIR, GAYAZOV, ROBERT RAFILEVITCH
Year of Publication 12.08.2009
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Year of Publication 12.08.2009
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RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
KRIVTSUN, VLADIMIR MIHAILOVITCH, IVANOV, VLADIMIR VITALAEEVITCH, SIDELKOV, YURII VICTOROVITCH, STEVENS, LUCAS HENRICUS JOHANNES, KOSHELEV, KONSTANTIN NIKOLAEVITCH, BANINE, VADIM YEVGENYEVICH, KIEFT, ERIK RENE, ROELEF LOOPSTRA. ERIK, FRIJNS, OLAV WALDEMAR VLADIMIR, GAYAZOV, ROBERT RAFILEVITCH, KOLOSHNIKOV, VSEVOLOD GRIGOREVITECH
Year of Publication 29.07.2009
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Year of Publication 29.07.2009
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Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured
KRIVTSUN, VLADIMIR MIHAILOVITCH, KOROB, EVGENII DMITREEVITCH, KOSHELEV, KONSTANTIN NIKOLAEVITCH, IVANOV, VLADIMIR VITALEVITCH, GAYAZOV, ROBERT RAFILEVITCH, ZUKAVISHVILI, GIVI GEORGIEVITCH
Year of Publication 08.03.2006
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Year of Publication 08.03.2006
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Radiation generating device lithographic apparatusdevice manufacturing method and device manufactur ed thereby
VLADIMIR VITALEVITCH IVANOV, GIVI GEORGIEVITCH ZUKAVISHVILI, VLADIMIR MIHAILOVITCH KRIVTSUN, KONSTANTIN NIKOLAEVITCH KOSHELEV, ROBERT RAFILEVITCH GAYAZOV, EVGENII DMITREEVITCH KOROB
Year of Publication 28.02.2006
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Year of Publication 28.02.2006
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Radiation source, lithographic apparatus and device manufacturing method
Koshelev, Konstantin Nikolaevitch, Banine, Vadim Yevgenyevich, Ivanov, Vladimir Vital'Evitch, Kieft, Erik René, Loopstra, Erik Roelof, Stevens, Lucas Henricus Johannes, Sidelkov, Yurii Victorovitch, Koloshnikov, Vsevolod Grigorevitch, Krivtsun, Vladimir Mihailovitch, Gayazov, Robert Rafilevitch, Frijns, Olav Waldemar Vladimir
Year of Publication 05.05.2009
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Year of Publication 05.05.2009
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Radiation source, lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF, BANINE VADIM YEVGENYEVICH, KOLOSHNIKOV VSEVOLOD GRIGOREVITCH, GAYAZOV ROBERT RAFILEVITCH, KRIVTSUN VLADIMIR MIHAILOVITCH, SIDELKOV YURII VICTOROVITCH, STEVENS LUCAS HENRICUS JOHANNES, KIEFT ERIK RENE, IVANOV VLADIMIR VITAL'EVITCH, FRIJNS OLAV WALDEMAR VLADIMIR, KOSHELEV KONSTANTIN NIKOLAEVITCH
Year of Publication 05.05.2009
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Year of Publication 05.05.2009
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