Sequential Lateral Solidification of Silicon Thin Films on Cu BEOL-Integrated Wafers for Monolithic 3-D Integration
Carta, Fabio, Gates, Stephen M., Limanov, Alexander B., Im, James S., Edelstein, Daniel C., Kymissis, Ioannis
Published in IEEE transactions on electron devices (01.11.2015)
Published in IEEE transactions on electron devices (01.11.2015)
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Journal Article
Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-κ dielectric films for very large-scale integrated interconnects
Todd Ryan, E., Gates, Stephen M., Cohen, Stephan A., Ostrovski, Yuri, Adams, Ed, Virwani, Kumar, Grill, Alfred
Published in Journal of applied physics (14.04.2014)
Published in Journal of applied physics (14.04.2014)
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Journal Article
Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage
Ryan, E. Todd, Gates, Stephen M., Grill, Alfred, Molis, Steven, Flaitz, Philip, Arnold, John, Sankarapandian, Muthumanickam, Cohen, Stephan A., Ostrovski, Yuri, Dimitrakopoulos, Christos
Published in Journal of applied physics (01.11.2008)
Published in Journal of applied physics (01.11.2008)
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Journal Article
Detection of open or closed porosity in low- κ dielectrics by solvent diffusion
Worsley, Marcus A., Roberts, Mark, Bent, Stacey F., Gates, Stephen M., Shaw, Thomas, Volksen, Willi, Miller, Robert
Published in Microelectronic engineering (01.10.2005)
Published in Microelectronic engineering (01.10.2005)
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Journal Article
NONLITHOGRAPHIC METHOD FOR PRODUCING SELF-ALIGNED MASK WITHOUT USING LITHOGRAPHIC DEVICE, PRODUCT PRODUCED BY THE SAME AND COMPOSITION FOR PERFORMING THE METHOD
SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JEFFREY C, HUANG ELBERT, GATES STEPHEN M, NITTA SATYANARAYANA V, PURUSHOTHAMAN SAMPATH, COLBURN MATTHEW E
Year of Publication 12.05.2004
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Year of Publication 12.05.2004
Patent
NON-LITHOGRAPHIC METHOD FOR PRODUCING MASK BY SELECTIVE REACTION, ARTICLE PRODUCED THEREBY AND COMPOSITION THEREFOR
SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JEFFREY C, HUANG ELBERT, GATES STEPHEN M, NITTA SATYANARAYANA V, PURUSHOTHAMAN SAMPATH, COLBURN MATTHEW E
Year of Publication 12.05.2004
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Year of Publication 12.05.2004
Patent
In situ determination of the effects of carbon dioxide and other volatile impurities on yttrium barium copper oxide (YBa2Cu3O7-x)
Greenlief, C. Michael, Bringley, Joseph F, Scott, Bruce A, Gates, Stephen M, Trail, Steven S, D'Emic, Christopher
Published in Chemistry of materials (01.07.1990)
Published in Chemistry of materials (01.07.1990)
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Journal Article
Property modifications of nanoporous p SiCOH dielectrics to enhance resistance to plasma-induced damage
Ryan, E. Todd, Gates, Stephen M., Grill, Alfred, Molis, Steven, Flaitz, Philip, Arnold, John, Sankarapandian, Muthumanickam, Cohen, Stephan A., Ostrovski, Yuri, Dimitrakopoulos, Christos
Published in Journal of applied physics (13.11.2008)
Published in Journal of applied physics (13.11.2008)
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Journal Article
Incidence and predictors of positive intraoperative cultures in primary shoulder arthroplasty following prior ipsilateral shoulder surgery
Gates, Stephen, Nguyen, Ivy, Del Core, Michael, Nakonezny, Paul A., Bradley, Hallie, Khazzam, Michael
Published in JSES international (01.06.2020)
Published in JSES international (01.06.2020)
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Journal Article
ANTI-FUSE AND FUSE STRUCTURES FOR IMPROVING THE FUNCTIONALITY OF QUBIT CIRCUITS
Adiga, Vivekananda P, Budd, Russell A, Rettner, Charles Thomas, Gates, Stephen M
Year of Publication 04.04.2024
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Year of Publication 04.04.2024
Patent
ANTI-FUSE AND FUSE STRUCTURES FOR IMPROVING THE FUNCTIONALITY OF QUBIT CIRCUITS
Adiga, Vivekananda P, Budd, Russell A, Rettner, Charles Thomas, Gates, Stephen M
Year of Publication 19.10.2023
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Year of Publication 19.10.2023
Patent
Microwave-to-optical quantum transducers
Kamlapurkar, Swetha, Donaton, Ricardo Alves, Falk, Abram L, Orcutt, Jason S, Gates, Stephen M, Xiong, Chi
Year of Publication 23.05.2023
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Year of Publication 23.05.2023
Patent
Detection of open or closed porosity in IOW-K dielectrics by solvent diffusion
Worsley, Marcus A, Roberts, Mark, Bent, Stacey F, Gates, Stephen M, Shaw, Thomas, Volksen, Willi, Miller, Robert
Published in Microelectronic engineering (01.10.2005)
Published in Microelectronic engineering (01.10.2005)
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Journal Article