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Year of Publication 13.08.2009
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SiCOH film preparation using precursors with built-in porogen functionality
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Year of Publication 21.04.2009
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Year of Publication 21.04.2009
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SiCOH film preparation using precursors with built-in porogen functionality
MILLER ROBERT D, NGUYEN SON, GATES STEPHEN M, GRILL ALFRED, NEUMAYER DEBORAH A
Year of Publication 21.04.2009
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Year of Publication 21.04.2009
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IMPROVED LOW K POROUS SICOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMATION TREATMENT
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Year of Publication 12.03.2009
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LOW k POROUS SiCOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMATION TREATMENT
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Year of Publication 05.03.2009
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LOW k POROUS SiCOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMATION TREATMENT
SHAW THOMAS M, NGUYEN SON, GATES STEPHEN M, GRILL ALFRED, NITTA SATYANARAYANA V
Year of Publication 05.03.2009
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Year of Publication 05.03.2009
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SEMICONDUCTOR STRUCTURE WITH IMPROVED BONDING INTERFACE ON CARBON-BASED MATERIAL, METHOD FOR FORMING THE SAME, AND ELECTRONIC DEVICE
VO TUAN ANH, NEUMAYER DEBORAH ANN, DIMITRAKOPOULOS CHRISTOS, GATES STEPHEN M, DAMON B FARMER, NGUYEN SON VAN, GRILL ALFRED
Year of Publication 20.10.2011
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Year of Publication 20.10.2011
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ENHANCED BONDING INTERFACES ON CARBON-BASED MATERIALS FOR NANOELECTRONIC DEVICES
VO TUAN A, FARMER DAMON B, GATES STEPHEN M, DIMITRAKOPOULOS CHRISTOS D, GRILL ALFRED, NEUMAYER DEBORAH A, NGUYEN SON VAN
Year of Publication 29.09.2011
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Year of Publication 29.09.2011
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